Bonding sheet and manufacturing method thereof, and heat dissipation mechanism and manufacturing method thereof

Abstract

A CNT-metal composite structure is formed by forming a plurality of CNTs which stand side by side from a base substance, forming a sheet-shaped support film which covers upper ends of the CNTs, and filling gaps each present between adjacent ones of the CNTs with a metal. By this structure, highly reliable bonding sheet and heat dissipation mechanism which are very excellent in heat dissipation efficiency, and manufacturing methods of these are realized.

What is claimed is: 
     
         1 . A bonding sheet comprising:
 a sheet-shaped support film;   a plurality of carbon nanotubes which stand side by side, with one end of each being connected to a surface of the support film; and   a metal which fills gaps each present between adjacent ones of the carbon nanotubes.   
     
     
         2 . The bonding sheet according to  claim 1 , wherein the support film is made of a metal material. 
     
     
         3 . The bonding sheet according to  claim 1 , wherein the support film includes pieces of vertical graphene which stand along a longitudinal direction of the carbon nanotubes and are densely superimposed on one another. 
     
     
         4 . The bonding sheet according to  claim 3 , wherein the support film includes horizontal graphene which is formed integrally with the pieces of vertical graphene by being connected to upper ends of the pieces of vertical graphene, and which grows in a vertical direction to the longitudinal direction of the carbon nanotubes. 
     
     
         5 . A heat dissipation mechanism comprising:
 a heat dissipation body; and   a bonding sheet which is bonded to a surface of the heat dissipation body, the bonding sheet comprising:
 a plurality of carbon nanotubes which stand side by side, with a tip of each being connected to the surface of the heat dissipation body; and 
 a metal which fills gaps each present between adjacent ones of the carbon nanotubes. 
   
     
     
         6 . The heat dissipation mechanism according to  claim 5 , wherein the bonding sheet is bonded to the surface of the heat dissipation body via an adhesive layer. 
     
     
         7 . A manufacturing method of a bonding sheet, the method comprising:
 forming a plurality of carbon nanotubes which stand side by side from a base substance;   forming a sheet-shaped support film which covers upper ends of the carbon nanotubes; and   filling gaps each present between adjacent ones of the carbon nanotubes with a metal.   
     
     
         8 . The manufacturing method of the bonding sheet according to  claim 7 , wherein the support film is made of a metal material. 
     
     
         9 . A manufacturing method of a bonding sheet, the method comprising:
 growing pieces of vertical graphene which stand in a direction vertical to a surface of a base substance and are densely superimposed on one another, and subsequently growing a plurality of carbon nanotubes standing side by side whose upper ends are connected to lower ends of the pieces of vertical graphene; and   filling gaps each present between adjacent ones of the carbon nanotubes with a metal.   
     
     
         10 . The manufacturing method of the bonding sheet according to  claim 9 , wherein horizontal graphene is grown in a horizontal direction to the surface of the base substance, and under the horizontal graphene, the pieces of vertical graphene formed integrally with the horizontal graphene by having upper ends connected to the horizontal graphene are grown. 
     
     
         11 . The manufacturing method of the bonding sheet according to  claim 7 , wherein a solution in which fine particles of the metal are dispersed in a solvent is supplied to the gaps between the carbon nanotubes, and the gaps each present between the adjacent ones of the carbon nanotubes are filled with the fine particles. 
     
     
         12 . The manufacturing method of the bonding sheet according to  claim 11 , wherein the supply of the solution to the gaps between the carbon nanotubes is executed a plurality of times. 
     
     
         13 . A manufacturing method of a heat dissipation mechanism, the method comprising:
 forming a plurality of carbon nanotubes which stand side by side from a base substance;   filling gaps each present between adjacent ones of the carbon nanotubes with a metal in a state where tips of the carbon nanotubes abut on a surface of a heat dissipation body; and   heat-treating the carbon nanotubes and the metal.   
     
     
         14 . The manufacturing method of the heat dissipation mechanism according to  claim 13 , wherein a solution in which fine particles of the metal are dispersed in a solvent is supplied to the gaps between the carbon nanotubes, and the gaps each present between the adjacent ones of the carbon nanotubes are filled with the fine particles. 
     
     
         15 . The manufacturing method of the heat dissipation mechanism according to  claim 14 , wherein the supply of the solution to the gaps between the carbon nanotubes is executed a plurality of times.