Transistor-Containing Constructions and Memory Arrays
Abstract
Some embodiments include transistor-containing constructions having gate material within an opening in a semiconductor material and spaced from the semiconductor material by gate dielectric material. The opening has a wide lower region beneath a narrow upper region. A saddle region of the gate dielectric material extends outwardly from a bottom of the opening and is along the semiconductor material beneath the opening. A saddle region of the gate material extends outwardly from the bottom of the opening and is along the gate dielectric material beneath the opening. Source/drain regions are within the semiconductor material along sides of the gate material. Some embodiments include memory arrays.
Claims
exact text as granted — not AI-modified1 - 35 . (canceled)
36 . A transistor-containing construction, comprising:
a recess extending into a semiconductor material; the recess having a narrow upper region and a wide lower region; gate material within a bottom portion of the wide lower region; the gate material extending outwardly from the bottom of the recess and downwardly to beneath the recess; and a pair of spaced-apart source/drain regions within the semiconductor material along sides of the recess, with a channel region being between the spaced-apart source/drain regions.
37 . The construction of claim 36 wherein the gate material is within both the narrow upper region of the recess and the wide lower region of the recess.
38 . The construction of claim 36 wherein insulative material is over the gate material within the recess and directly contacts the gate material along an interface; the insulative material being within a top portion of the wide lower region, and being within the narrow upper region; the source/drain regions vertically overlapping the interface of the insulative material and the gate material.
39 . The construction of claim 38 wherein the gate material within the recess is comprised by a wordline extending through the recess; wherein the gate material extending outwardly from the bottom of the recess forms a saddle region along the semiconductor material; and wherein said saddle region has a width about the same as a width of the wordline.
40 . The construction of claim 38 wherein the gate material within the recess is comprised by a wordline extending through the recess; wherein the gate material extending outwardly from the bottom of the recess forms a saddle region along the semiconductor material; and wherein said saddle region has a width less than a width of the wordline.
41 . The construction of claim 38 wherein the recess substantially has mirror symmetry along a plane extending vertically along a center of the recess.
42 . The construction of claim 38 wherein the recess does not have mirror symmetry along a plane extending vertically along a center of the recess.
43 . The construction of claim 38 wherein the narrow upper region is inset relative to the wide lower region by a step along one side of the recess.
44 . The construction of claim 43 wherein the step is a first step, and further comprising a second step on an opposing side of the narrow upper region from the first step.
45 . A transistor-containing construction, comprising:
gate material within an opening in a silicon-containing material, and spaced from the silicon-containing material by gate dielectric material; insulative material over the gate material and directly contacting the gate material along an interface, the insulative material being within the opening; the insulative material having a narrow section over a wide section; the wide section having a same width as the gate material; the insulative material comprising one or both of silicon dioxide and silicon nitride; a saddle region of the gate dielectric material extending outwardly from a bottom of the opening and along the silicon-containing material beneath the opening; a saddle region of the gate material extending outwardly from the bottom of the opening and along the gate dielectric material beneath the opening; and source/drain regions within the silicon-containing material along sides of the insulative material and gate material, the source/drain regions vertically overlapping the interface of the insulative material and the gate material.
46 . The construction of claim 45 wherein the gate material within the opening has a first width; and wherein the saddle region gate material has a second width which is about the same as the first width.
47 . The construction of claim 45 wherein the gate material within the opening has a first width; and wherein the saddle region gate material has a second width which is less than the first width.
48 . The construction of claim 45 wherein the insulative material and the gate material substantially have mirror symmetry along a plane extending vertically along a center through the insulative material and the gate material.
49 . The construction of claim 45 wherein the insulative material and the gate material do not have mirror symmetry along a plane extending vertically along a center through the insulative material and the gate material.
50 . A memory array, comprising:
a plurality of transistor constructions within a semiconductor material; each transistor construction comprising:
gate material within an opening in the semiconductor material, and spaced from the semiconductor material by gate dielectric material; the gate material within the opening being part of a wordline;
a saddle region of the gate dielectric material extending outwardly from a bottom of the opening and along the semiconductor material beneath the opening;
a saddle region of the gate material extending outwardly from the bottom of the opening and along the gate dielectric material beneath the opening; and
source/drain regions within the semiconductor material along sides of the gate material; and
a pair of adjacent transistor constructions sharing a source/drain region; the shared source/drain region being connected to a bitline; the adjacent transistor constructions also comprising source/drain regions which are not shared, and which are connected to memory structures.
51 . The memory array of claim 50 wherein the memory structures are capacitors.
52 . The memory array of claim 50 wherein an individual transistor construction has gate material within the opening having a first width; and has saddle region gate material having a second width which is about the same as the first width.
53 . The memory array of claim 50 wherein an individual transistor construction has gate material within the opening having a first width; and has saddle region gate material having a second width which is less than the first width.Join the waitlist — get patent alerts
Track US2016093709A1 — get alerts on status changes and closely related new filings.
We store only your email — no account needed. See our privacy policy.