Retainer and wafer carrier including the same

Abstract

A retainer for a wafer carrier comprising: a body including a plurality of slots configured to receive side surfaces of wafers; and for each of the slots, a supporting structure formed on a sidewall of the slot and configured to make contact with the side surfaces of a corresponding wafer, the supporting structure being spaced apart from an upper corner of the side surface of the corresponding wafer.

What is claimed is: 
     
         1 . A retainer for a wafer carrier comprising:
 a body including a plurality of slots configured to receive side surfaces of wafers; and   for each of the slots, a supporting structure formed on a sidewall of the slot and configured to make contact with the side surfaces of a corresponding wafer, the supporting structure being spaced apart from an upper corner of the side surface of the corresponding wafer.   
     
     
         2 . The retainer for a wafer carrier of  claim 1 , wherein for at least one of the slots, the supporting structure is spaced apart from a lower corner of the side surface of the corresponding wafer. 
     
     
         3 . The retainer for a wafer carrier of  claim 1 , wherein for at least one of the slots, the supporting structure has a rounded surface configured to make point contact with the side surface of the corresponding wafer. 
     
     
         4 . The retainer for a wafer carrier of  claim 3 , wherein for the at least one of the slots, the supporting structure comprises an embossing having the rounded surface. 
     
     
         5 . The retainer for a wafer carrier of  claim 1 , wherein for at least one of the slots, the supporting structure has a hollow structure. 
     
     
         6 . The retainer for a wafer carrier of  claim 1 , wherein for at least one of the slots, the supporting structure comprises a supporting surface configured to partially make face contact with the side surface of the corresponding wafer. 
     
     
         7 . The retainer for a wafer carrier of  claim 6 , wherein for the at least one of the slots, the supporting surface is substantially parallel to the side surface of the corresponding wafer. 
     
     
         8 . The retainer for a wafer carrier of  claim 1 , wherein for at least one of the slots, the body further comprises a first receiving groove connected to the slot and configured to expose the upper corner of the corresponding wafer and an upper end of the supporting structure. 
     
     
         9 . The retainer for a wafer carrier of  claim 8 , wherein for the at least one of the slots, the body further comprises a second receiving groove connected to the slot and configured to expose a lower corner of the corresponding wafer and a lower end of the supporting structure. 
     
     
         10 . The retainer for a wafer carrier of  claim 1 , wherein for at least one of the slots, the supporting structure comprises a resilient material. 
     
     
         11 . The retainer for a wafer carrier of  claim 1 , wherein for at least one of the slots, the supporting structure is integrally formed with the body. 
     
     
         12 . The retainer for a wafer carrier of  claim 1 , wherein each of the wafers comprises:
 a carrier wafer; and   a device wafer attached to the carrier wafer, the device wafer having a side surface substantially coplanar with a side surface of the carrier wafer.   
     
     
         13 . The retainer for a wafer carrier of  claim 1 , wherein each of the wafers comprises:
 a carrier wafer; and   a device wafer attached to the carrier wafer, the device wafer having a side surface closer to a central portion of the carrier wafer than a side surface of the carrier wafer.   
     
     
         14 . A wafer carrier comprising:
 a case having an entrance configured to receive wafers, a first inner surface facing the entrance, and second and third inner surfaces extended from the first inner surface to the entrance;   a door installed at the entrance; and   retainers arranged on an inner surface of the door and on each of the first to third inner surfaces of the case, each retainer including a body including a plurality of slots configured to receive side surfaces of wafers, each slot including a supporting structure formed on a sidewall of the slot and configured to make contact with the side surfaces of a corresponding one of the wafers, the supporting structure configured to be spaced apart from an upper corner of the side surface of the corresponding wafer.   
     
     
         15 . The wafer carrier of  claim 14 , wherein structures of the slots of the retainer on the inner surface of the door are different from structures of the slots of the retainers on the second and third inner surfaces. 
     
     
         16 . The wafer carrier of  claim 14 , wherein the retainers on the second and third inner surfaces of the case have a rounded shape protruding towards the corresponding second or third surface. 
     
     
         17 . A retainer for a wafer carrier comprising:
 a body including a plurality of slots; and   for each of the slots, the slot comprises:
 an upper surface; 
 a lower surface; and 
 a supporting structure formed on a sidewall of the slot and protruding into the slot wherein a furthest extent of the protrusion of the supporting structure into the slot is offset from the upper surface. 
   
     
     
         18 . The retainer for a wafer carrier of  claim 17 , wherein for at least one of the slots, the furthest extent of the protrusion of the supporting structure into the slot is offset from the lower surface. 
     
     
         19 . The retainer for a wafer carrier of  claim 17 , wherein for at least one of the slots, the furthest extent of the protrusion of the supporting structure is a surface. 
     
     
         20 . The retainer for a wafer carrier of  claim 17 , wherein for at least one of the slots, the slot further comprises a groove disposed at a corner of the upper surface and the sidewall.