Organic layer deposition apparatus and method of manufacturing organic light-emitting display apparatus using the same

Abstract

An organic layer deposition apparatus includes a conveyer unit and a deposition unit that has one or more organic layer deposition assemblies configured to deposit an organic layer on a moving substrate. The conveyer unit includes a moving unit configured to move a substrate fixed thereto, a first conveyer unit configured to move the moving unit in a first direction during which an organic material is deposited on the substrate fixed to the moving unit, and a second conveyer unit configured to move the moving unit in a second direction opposite to the first direction after deposition is completed and the substrate is separated from the moving unit. The first conveyer unit and the second conveyer unit are configured to move through the deposition unit.

What is claimed is: 
     
         1 . An organic layer deposition apparatus, the apparatus comprising:
 a deposition unit comprising one or more organic layer deposition assemblies configured to deposit an organic layer on a moving substrate,   wherein each of the one or more organic layer deposition assemblies comprises:
 a deposition source configured to discharge a deposition material; and 
 a patterning slit sheet disposed to face the deposition source, 
 wherein the patterning slit sheet comprises:
 a first fixing frame; 
 a second fixing frame attached to the first fixing frame, said second fixing frame having at least one portion whose thickness is less than thicknesses of other portions; and 
 a pattern sheet that is fixed to the second fixing frame to face the deposition source, and which has a plurality of pattern slits. 
 
   
     
     
         2 . The apparatus of  claim 1 , wherein the second fixing frame comprises:
 a first fixing portion to which the pattern sheet is fixed;   a second fixing portion to which the first fixing frame is fixed; and   at least one etching portion formed on at least one of the first fixing portion and the second fixing portion and has at least one portion whose thickness is different from a thickness of the at least one of the first fixing portion and the second fixing portion.   
     
     
         3 . The apparatus of  claim 2 , further comprising at least one etching indentation formed in a surface of the at least one etching portion. 
     
     
         4 . The apparatus of  claim 2 , wherein the at least one etching portion surrounds an edge of the pattern sheet. 
     
     
         5 . The apparatus of  claim 1 , wherein the deposition material discharged by the deposition source flows through the patterning slit sheet to form a pattern on the moving substrate. 
     
     
         6 . The apparatus of  claim 1 , wherein a length of the patterning slit sheet is less than a length of the moving substrate along a moving direction of the moving substrate. 
     
     
         7 . The apparatus of  claim 1 , further comprising:
 a conveyer unit that includes   a moving unit configured to move a substrate fixed thereto,   a first conveyer unit configured to move the moving unit in a first direction during which an organic material is deposited on the substrate fixed to the moving unit, and   a second conveyer unit configured to move the moving unit in a second direction opposite to the first direction after deposition is completed and the substrate is separated from the moving unit,   wherein the first conveyer unit and the second conveyer unit are configured to move through the deposition unit.   
     
     
         8 . The apparatus of  claim 7 , wherein the first conveyer unit and the second conveyer unit are vertically spaced apart from each other. 
     
     
         9 . The apparatus of  claim 7 , wherein the moving unit is configured to be transferred between the first conveyer unit and the second conveyer unit, and the substrate fixed to the moving unit is spaced apart from the organic layer deposition assembly by a predetermined interval while being moved by the first conveyer unit. 
     
     
         10 . An organic layer deposition apparatus, the apparatus comprising:
 a conveyer unit that includes
 a moving unit configured to move a substrate fixed thereto, 
 a first conveyer unit configured to move the moving unit in a first direction during which an organic material is deposited on the substrate fixed to the moving unit, and 
 a second conveyer unit configured to move the moving unit in a second direction opposite to the first direction after deposition is completed and the substrate is separated from the moving unit, and 
   a deposition unit comprising one or more organic layer deposition assemblies configured to deposit an organic layer on a moving substrate, wherein each of the one or more organic layer deposition assemblies comprises:   
       a deposition source configured to discharge a deposition material; and
 a patterning slit sheet disposed to face the deposition source, 
 wherein the first conveyer unit and the second conveyer unit are configured to move through the deposition unit, 
 
       wherein the patterning slit sheet comprises:
 a first fixing frame; 
 a second fixing frame attached to the first fixing frame, said second fixing frame having at least one portion whose thickness is less than thicknesses of other portions; and 
 a pattern sheet that is fixed to the second fixing frame to face the deposition source, and which has a plurality of pattern slits, 
 wherein the deposition material discharged by the deposition source flows through the patterning slit sheet to form a pattern on the moving substrate. 
 
     
     
         11 . The apparatus of  claim 10 , wherein the second fixing frame comprises:
 a first fixing portion to which the pattern sheet is fixed;   a second fixing portion to which the first fixing frame is fixed;   at least one etching portion formed on at least one of the first fixing portion and the second fixing portion and has at least one portion whose thickness is different from a thickness of the at least one of the first fixing portion and the second fixing portion; and   at least one etching indentation formed in a surface of the at least one etching portion.   
     
     
         12 . The apparatus of  claim 10 , wherein the first conveyer unit and the second conveyer unit are vertically spaced apart from each other. 
     
     
         13 . The apparatus of  claim 10 , wherein the moving unit is configured to be transferred between the first conveyer unit and the second conveyer unit, and the substrate fixed to the moving unit is spaced apart from the organic layer deposition assembly by a predetermined interval while being moved by the first conveyer unit.