Process For Operating A Clean Room And Control Device

Abstract

The invention relates to process for operating a clean room and to a control device for a clean room, the clean room ( 10 ) comprising a work room ( 12, 13, 14 ), a room ventilation system ( 15 ) and a control device ( 16 ), the room ventilation system being controlled and/or regulated by means of the control device, an air exchange rate in the work room and a pressure difference between the work room and an environment ( 25 ) being generated by means of the room ventilation system, the control device comprising at least one sensor device ( 19 ) for registering an actual value representing an operating parameter, wherein the air exchange rate is adjusted by means of the control device in such a manner that the actual value is in the range of a target value.

1 . A process for operating a clean room ( 12 ,  28 ), the clean room comprising a work room ( 12 ,  13 ,  14 ,  29 ), a room ventilation system ( 15 ,  30 ) and a control device ( 16 ,  31 ), the room ventilation system being controlled and/or regulated by means of the control device, an air exchange rate in the work room and a pressure difference between the work room and an environment ( 25 ,  45 ) being generated by means of the room ventilation system, the control device comprising at least one sensor device ( 19 ,  48 ) for registering an actual value representing an operating parameter,
 characterized in that   the air exchange rate is adjusted by means of the control device in such a manner that the actual value is in the range of a target value.   
     
     
         2 . The process according to  claim 1 ,
 characterized in that   a positive pressure is generated in the work room ( 12 ,  13 ,  14 ,  29 ) as a pressure difference.   
     
     
         3 . The process according to  claim 1  or  2 ,
 characterized in that 
 the pressure difference and an air quality in the work room ( 12 ,  13 ,  14 ,  29 ) and/or an actual value representing an operating parameter of the work room are registered by means of the sensor device ( 19 ,  48 ). 
 
     
     
         4 . The process according to any one of the preceding claims,
 characterized in that   an actual value for particle concentration, air temperature, relative air humidity, air exchange rate, air pressure, intensity of movement, number of individuals, CO 2  concentration and/or door opening is registered by means of the sensor device ( 19 ,  48 ).   
     
     
         5 . The process according to  claim 4 ,
 characterized in that   the particle concentration is measured at a workplace in the work room ( 12 ,  13 ,  14 ,  29 ) or in an exhaust air of the room ventilation system ( 15 ,  30 ).   
     
     
         6 . The process according to any one of the preceding claims,
 characterized in that   the control device ( 16 ,  31 ) selects a target value as a function of a time control ( 22 ) and/or of an intensity of movement, a target activity value for an operating period or a target inactivity value for an inactivity period being selected as the target value.   
     
     
         7 . The process according to  claim 6 ,
 characterized in that   during the inactivity period, a particle concentration, a temperature and/or a relative air humidity are increased or the particle concentration is increased and the temperature and/or the relative air humidity are decreased in comparison to the operating period.   
     
     
         8 . The process according to any one of the preceding claims,
 characterized in that   control of the pressure difference is superseded by control of the air exchange rate.   
     
     
         9 . The process according to any one of the preceding claims,
 characterized in that   the room ventilation system ( 15 ,  30 ) comprises a first ventilator ( 38 ) for supply air and a second ventilator ( 42 ) for exhaust air, the control device ( 16 ,  31 ) controlling the pressure difference by adjusting speeds of rotation of the respective ventilators.   
     
     
         10 . The process according to  claim 9 ,
 characterized in that   the control device ( 16 ,  31 ) controls a speed of rotation of the first ventilator ( 38 ) as a function of the operating parameter, preferably of an air temperature and of a particle concentration.   
     
     
         11 . The process according to  claim 10 ,
 characterized in that   the sensor device ( 19 ,  48 ) registers an air temperature of the supply air and an air temperature of the exhaust air, the control device controlling a speed of rotation of the first ventilator ( 38 ) and/or a treatment of the supply air as a function of the air temperature of the exhaust air.   
     
     
         12 . The process according to any one of  claims 9  to  11 ,
 characterized in that 
 the control device ( 16 ,  31 ) controls a speed of rotation of the second ventilator ( 42 ) as a function of the pressure difference, preferably of an air pressure in the work room ( 12 ,  13 ,  14 ,  29 ) and of a speed of rotation of the first ventilator ( 38 ). 
 
     
     
         13 . The process according to any one of the preceding claims,
 characterized in that   the control device ( 16 ,  31 ) stores operating parameters that are registered during an operating period and derives regularly recurring sequences of operating conditions from the stored operating parameters, the control device adjusting the air exchange rate to an operating condition to be expected in the future.   
     
     
         14 . A control device ( 16 ,  31 ) for a clean room ( 12 ,  28 ), the clean room comprising a work room ( 12 ,  13 ,  14 ,  29 ) and a room ventilation system ( 15 ,  30 ), wherein the room ventilation system can be controlled and/or regulated by means of the control device, wherein an air exchange rate in the work room and a pressure difference between the work room and an environment ( 25 ,  45 ) can be generated by means of the room ventilation system, the control device comprising at least one sensor device ( 19 ,  48 ) for registering an actual value representing an operating parameter,
 characterized in that   the air exchange rate can be adjusted by means of the control device in such a manner that the actual value is in the range of a target value.   
     
     
         15 . A clean room ( 12 ,  28 ) comprising a work room ( 12 ,  13 ,  14 ,  29 ), a room ventilation system ( 15 ,  30 ) and a control device ( 16 ,  31 ) according to  claim 14 . 
     
     
         16 . The clean room according to  claim 15 ,
 characterized in that   the clean room ( 12 ,  28 ) comprises a plurality of interconnected work rooms ( 12 ,  13 ,  14 ,  29 ) having different pressure differences.