US2016071843A1PendingUtilityA1

Semiconductor Device and Method of Fabricating the Same

Assignee: PS4 LUXCO SARLPriority: Jan 8, 2010Filed: Nov 17, 2015Published: Mar 10, 2016
Est. expiryJan 8, 2030(~3.4 yrs left)· nominal 20-yr term from priority
Inventors:Tomohiro Kadoya
H10D 84/83H10W 20/0698H10D 89/10H10D 84/0149H10D 84/038H10D 1/716H10D 1/042H01L 27/088H10B 12/485H10B 12/09H10B 12/0335H10B 12/033
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Claims

Abstract

A semiconductor device includes the following elements. An element isolation portion separates first and second diffusion regions in a semiconductor substrate each other. A first insulating film is formed over the element isolation portion and the first and second diffusion regions. First and second contact plugs are formed over the first and second diffusion regions, respectively. The first and second contact plugs penetrate the first insulating film. A first conductive layer is formed over the first insulating film over the element isolation portion. A second insulating film is formed over the first conductive layer. A third contact plug penetrates the second insulating film, the third contact plug connecting the first contact plug. A second conductive layer is formed over the second insulating film contacting the third contact plug. The first and second conductive layers partly overlap the element isolation portion.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A semiconductor device comprising:
 a semiconductor substrate;   first and second diffusion regions in the semiconductor substrate;   an element isolation portion separating the first and second diffusion regions from each other;   a first insulating film over the element isolation portion and the first and second diffusion regions;   first and second contact plugs over the first and second diffusion regions, respectively, the first and second contact plugs penetrating the first insulating film;   a first conductive layer over the first insulating film;   a second insulating film over the first conductive layer;   a third contact plug penetrating the second insulating film, the third contact plug being connected to the first contact plug; and   a second conductive layer over the second insulating film, the second conductive layer contacting the third contact plug,   wherein the first and second conductive layers partly overlap the element isolation portion.

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