US2016067680A1PendingUtilityA1

Graphene patterning method and patterning member

Assignee: TOKYO ELECTRON LTDPriority: Jan 15, 2013Filed: Nov 12, 2015Published: Mar 10, 2016
Est. expiryJan 15, 2033(~6.5 yrs left)· nominal 20-yr term from priority
B01J 23/755H10W 20/4462H10W 20/094H10W 20/031H01L 23/53276H01L 21/76823
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Claims

Abstract

A graphene patterning method for forming a graphene of predetermined pattern includes bringing a patterning member in which a catalyst metal layer of the predetermined pattern is formed into contact with a substrate having a graphene oxide film. In bringing the patterning member, the catalyst metal layer is brought into contact with the graphene oxide film.

Claims

exact text as granted — not AI-modified
1 - 7 . (canceled) 
     
     
         8 . A patterning member configured to make contact with a substrate having a graphene oxide film, comprising:
 a catalyst metal layer of a predetermined pattern formed on a surface of the patterning member making contact with the graphene oxide film.   
     
     
         9 . The member of  claim 8 , wherein the catalyst metal layer comprises at least one metal selected from the group consisting of Cu, Ag, Au, Pt, Cr, Mn, Fe, Co, Ni and Mo. 
     
     
         10 . The member of  claim 8 , wherein the patterning member comprises a plurality of catalyst metal layers of the predetermined pattern arranged in the portions making contact with the substrate.

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