Method for providing a magnetic recording transducer using a chemical buffer

Abstract

A method for fabricating a magnetic recording transducer is described. The magnetic recording transducer has an underlayer and at least one layer on the underlayer. The layer(s) are capable of including an aperture that exposes a portion of the underlayer. The method includes providing a neutralized aqueous solution having a chemical buffer therein. The chemical buffer forms a nonionic full film corrosion inhibitor. The method also includes exposing a portion of the magnetic recording transducer including the layer(s) to the neutralized aqueous solution including the chemical buffer. In one aspect this exposure occurs through a chemical mechanical planarization.

1 . A method for fabricating a magnetic recording transducer having an underlayer at least one layer on the underlayer and a structure under the underlayer, the at least one layer capable of including an aperture that exposes a portion of the underlayer, the method comprising:
 providing a neutralized aqueous solution having a chemical buffer therein, the chemical buffer for forming a nonionic full film corrosion inhibitor, the nonionic full film corrosion inhibitor including a monolayer of at least a portion of the chemical buffer, the nonionic full film corrosion inhibitor inhibiting removal of the portion of the underlayer exposed by the aperture by forming the nonionic full film corrosion inhibitor on at least the aperture; and   exposing a portion of the magnetic recording transducer including the at least one layer to the neutralized aqueous solution including the chemical buffer, corrosion of the structure being inhibited by inhibition of removal of the portion of the underlayer by the nonionic full film corrosion inhibitor.   
     
     
         2 . The method of  claim 1  wherein the underlayer further includes aluminum oxide. 
     
     
         3 . The method of  claim 2  wherein the layer includes Ru. 
     
     
         4 . The method of  claim 1  wherein the neutralized aqueous solution includes a chemical mechanical planarization (CMP) solution. 
     
     
         5 . The method of  claim 1  wherein the step of providing the neutralized aqueous solution having the chemical buffer therein further includes:
 neutralizing a non-neutral aqueous solution; and 
 providing at least one additive for the chemical buffer after the step of neutralizing the non-neutral aqueous solution. 
 
     
     
         6 . The method of  claim 5  wherein the non-neutral aqueous solution is either an acidic aqueous solution or a basic aqueous solution. 
     
     
         7 . The method of  claim 1  wherein the step of providing the neutralized aqueous solution having the chemical buffer therein further includes:
 providing at least one additive for the chemical buffer to a non-neutral aqueous solution; and 
 neutralizing the non-neutral aqueous solution after the step of providing the at least one additive. 
 
     
     
         8 . The method of  claim 7  wherein the non-neutral aqueous solution is either an acidic aqueous solution or a basic aqueous solution. 
     
     
         9 . A method for fabricating a magnetic recording transducer including a magnetoresistive sensor, an aluminum oxide layer adjacent to the magnetoresistive sensor and a Ru layer on the aluminum oxide layer, the method comprising:
 providing a neutralized aqueous solution having a chemical buffer therein, the chemical buffer for forming a nonionic full film corrosion inhibitor, the chemical buffer including at least one of at least one amine and at least one polyoxyethylated nonionic surfactant, the at least one polyoxyethylated surfactant including at least one of alkylphenols having a first hydrophobic tail portion including less than fifteen C—C chains and fatty alcohol ethoxylates having a second hydrophobic tail portion including less than the fifteen C—C chains, the at least one amine includes at least one quaternary ammonium salt; and   performing a chemical mechanical planarization (CMP) using the neutralized aqueous solution as at least part of a slurry, the CMP capable of forming an aperture in the Ru layer and exposing a portion of the aluminum oxide layer under the aperture.