Getter structure and method for forming such structure

Abstract

A getter structure and method wherein a layer of seed material is deposited on a predetermined region of a surface of a structure under conditions to form a plurality of nucleation sites on a surface of the structure. The nucleation sites have an average height over the surface area of the predetermined region of less than one molecule thick. Subsequently a getter material is deposited over the surface to form a plurality of getter material members projecting outwardly from the nucleation sites.

What is claimed is: 
     
         1 . A method for forming a getter structure, comprising:
 forming a plurality of nucleation sites of a seed material on a surface of the structure; and   forming a plurality of getter material members projecting outwardly from the nucleation sites.   
     
     
         2 . The method recited in  claim 1  wherein the seed material is formed on a region of the surface having a predetermined surface area and wherein the nucleation sites have an average height over the predetermined surface of less than one molecule thick. 
     
     
         3 . The method recited in  claim 2  wherein the getter material is titanium. 
     
     
         4 . A method for forming a getter structure, comprising:
 depositing a layer of seed material on a surface of a structure under conditions to form a plurality of nucleation sites on a surface of the structure; and   subsequently depositing a getter material over the surface to form a plurality of getter material members projecting outwardly from the nucleation sites.   
     
     
         5 . The method recited in  claim 4  wherein the deposition is flash evaporation or electron -beam deposition. 
     
     
         6 . The method recited in  claim 4  including oxidizing the nucleation sites prior to the getter material deposition. 
     
     
         7 . The method recited. in  claim 4  wherein the seed material is formed on a region of the surface having a predetermined surface area and wherein the nucleation sites have an average height over the predetermined surface of less than one molecule thick.