US2016033547A1PendingUtilityA1
Method and Apparatus of Physical Property Measurement Using a Probe-Based Nano-Localized Light Source
Est. expiryMar 8, 2033(~6.6 yrs left)· nominal 20-yr term from priority
G01Q 60/38G01Q 20/02G01Q 10/065G01Q 60/22G01Q 60/06G01Q 10/00
55
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Claims
Abstract
An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A method of ultrafast spectroscopy comprising:
plasmonic nanofocusing electromagnetic waves directed at an AFM tip, the AFM tip interacting with a sample; and controlling dynamic interactions of the sample on the nanoscale using the nanofocusing step; and wherein the sample is at least one of molecular and solid matter.Join the waitlist — get patent alerts
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