Imprint apparatus and article manufacturing method

Abstract

An imprint apparatus of the present invention that molds and cures an imprint material on a substrate using a mold to form a pattern on the substrate. The imprint apparatus includes a supply unit configured to supply a gas into a gap between the imprint material on the substrate and the mold. The supply unit is configured to supply a mixed gas in which a permeable gas, which permeates at least one of the mold, the imprint material and the substrate, and a condensable gas, which is liquefied under a pressure generated by the molding, is mixed with each other.

What is claimed is: 
     
         1 . An imprint apparatus that performs molding of an imprint material on a substrate using a mold to form a pattern on the substrate, the imprint apparatus comprising:
 a supply unit including a mixing unit configured to mix permeable gas that permeates the mold, the imprint material or the substrate or any two thereof or all thereof, and condensable gas that is different from gas of a constituent of the imprint material and liquefied under a pressure generated by the molding, and configured to perform supplying of the mixed gas between the imprint material on the substrate and the mold from the mixing unit,   wherein the imprint apparatus is configured to perform the molding with the supplying having been performed.   
     
     
         2 . The apparatus according to  claim 1 , wherein the permeable gas includes helium or hydrogen or both thereof. 
     
     
         3 . The apparatus according to  claim 1 , wherein the condensable gas includes hydrofluorocarbon or hydrofluoroether or both thereof. 
     
     
         4 . The apparatus according to  claim 1 , wherein the supply unit includes a supply nozzle and is configured to supply the mixed gas from the mixing unit via the supply nozzle. 
     
     
         5 . The apparatus according to  claim 1 , further comprising an adjustment device configured to adjust a ratio of constituents of the mixed gas. 
     
     
         6 . The apparatus according to  claim 5 , further comprising:
 a detector configured to detect a constituent of the mixed gas,   wherein the adjustment device is configured to adjust the ratio based on an output of the detector.   
     
     
         7 . The apparatus according to  claim 1 , further comprising a recovery nozzle configured to recover the mixed gas. 
     
     
         8 . A method of manufacturing an article, the method comprising the steps of:
 forming a pattern on a substrate using an imprint apparatus; and   processing the substrate, on which the pattern has been formed, to manufacture the article,   wherein the imprint apparatus performs molding of an imprint material on the substrate using a mold to form the pattern on the substrate, the imprint apparatus including:   a supply unit including a mixing unit configured to mix permeable gas that permeates the mold, the imprint material or the substrate or any two thereof or all thereof, and condensable gas that is different from gas of a constituent of the imprint material and liquefied under a pressure generated by the molding, and configured to perform supplying of the mixed gas between the imprint material on the substrate and the mold from the mixing unit,   wherein the imprint apparatus is configured to perform the molding with the supplying having been performed.   
     
     
         9 . An imprint method of performing molding of an imprint material on a substrate using a mold to form a pattern on the substrate, the method comprising the steps of:
 mixing, with a mixing unit, permeable gas that permeates the mold, the imprint material or the substrate or any two thereof or all thereof, and condensable gas that is different from gas of a constituent of the imprint material and liquefied under a pressure generated by the molding;   supplying, from the mixing unit, the mixed gas between the imprint material on the substrate and the mold; and   performing the molding with the supplying having been performed.   
     
     
         10 . A method of manufacturing an article, the method comprising the steps of:
 mixing, with a mixing unit, permeable gas that permeates the mold, the imprint material or the substrate or any two thereof or all thereof, and condensable gas that is different from a gas of a constituent of the imprint material and liquefied under a pressure generated by molding;   supplying, from the mixing unit, the mixed gas between the imprint material on the substrate and the mold;   performing molding, with the supplying having been performed, of the imprint material on the substrate using the mold to form a pattern on the substrate; and   processing the substrate, on which the pattern has been formed, to manufacture the article.   
     
     
         11 . An imprint apparatus that performs molding of an imprint material on a substrate using a mold to form a pattern on the substrate, the imprint apparatus comprising:
 a supply unit including a mixing unit configured to mix permeable gas that permeates the mold, the imprint material or the substrate or any two thereof or all thereof, and condensable gas that is liquefied under a pressure generated by the molding, and configured to perform supplying of the mixed gas between the imprint material on the substrate and the mold from the mixing unit,   wherein the imprint apparatus is configured to perform the molding with the supplying having been performed.   
     
     
         12 . The apparatus according to  claim 11 , wherein the permeable gas includes helium or hydrogen or both thereof. 
     
     
         13 . The apparatus according to  claim 11 , wherein the condensable gas includes hydrofluorocarbon or hydrofluoroether or both thereof. 
     
     
         14 . The apparatus according to  claim 11 , wherein the supply unit includes a supply nozzle and is configured to supply the mixed gas from the mixing unit via the supply nozzle. 
     
     
         15 . The apparatus according to  claim 11 , further comprising an adjustment device configured to adjust a ratio of constituents of the mixed gas. 
     
     
         16 . The apparatus according to  claim 15 , further comprising:
 a detector configured to detect a constituent of the mixed gas,   wherein the adjustment device is configured to adjust the ratio based on an output of the detector.   
     
     
         17 . The apparatus according to  claim 11 , further comprising a recovery nozzle configured to recover the mixed gas. 
     
     
         18 . A method of manufacturing an article, the method comprising the steps of:
 forming a pattern on a substrate using an imprint apparatus; and   processing the substrate, on which the pattern has been formed, to manufacture the article,   wherein the imprint apparatus performs molding of an imprint material on the substrate using a mold to form the pattern on the substrate, the imprint apparatus including:   a supply unit including a mixing unit configured to mix permeable gas that permeates the mold, the imprint material or the substrate or any two thereof or all thereof, and condensable gas that is liquefied under a pressure generated by the molding, and configured to perform supplying of the mixed gas between the imprint material on the substrate and the mold from the mixing unit,   wherein the imprint apparatus is configured to perform the molding with the supplying having been performed.   
     
     
         19 . An imprint method of performing molding of an imprint material on a substrate using a mold to form a pattern on the substrate, the method comprising the steps of:
 mixing, with a mixing unit, permeable gas that permeates the mold, the imprint material or the substrate or any two thereof or all thereof, and condensable gas that is liquefied under a pressure generated by the molding;   supplying, from the mixing unit, the mixed gas between the imprint material on the substrate and the mold; and   performing the molding with the supplying having been performed.   
     
     
         20 . A method of manufacturing an article, the method comprising the steps of:
 mixing, with a mixing unit, permeable gas that permeates the mold, the imprint material or the substrate or any two thereof or all thereof, and condensable gas that is liquefied under a pressure generated by molding;   supplying, from the mixing unit, the mixed gas between the imprint material on the substrate and the mold;   performing molding, with the supplying having been performed, of the imprint material on the substrate using the mold to form a pattern on the substrate; and   processing the substrate, on which the pattern has been formed, to manufacture the article.