Identification system

Abstract

Disclosed herein are systems and methods for identifying components of a system that may be used to treat microelectronic substrates. The components may not reside at the same location and may be out of visual range, such that technicians working on one system may not be able to distinguish the components of that system from other similar systems on manufacturing floor. In one embodiment, the components of the system may include status indicator lights that may indicate a common system status to enable the identification of the related components.

1 . An identification system for a semiconductor manufacturing machine, the machine comprising a main element associated with one or more auxiliary elements, wherein the identification system comprises one or more indicators provided on one or more of the auxiliary elements for indicating that an auxiliary element is associated with the main element of the machine, wherein, in use, said one or more indicators are activated when a trigger is activated on the main element, wherein the trigger comprises powering down the main element. 
     
     
         2 . The identification system of  claim 1 , wherein one or more of the auxiliary elements are housed remotely from the main element. 
     
     
         3 . The identification system of  claim 2 , wherein the main element is housed on one floor of a building and one or more of the auxiliary elements are housed on a different floor of the building. 
     
     
         4 . The identification system of  claim 3 , wherein the main element is provided within a restricted zone and one or more of the auxiliary elements are provided outside the restricted zone. 
     
     
         5 . The identification system of  claim 4 , wherein the restricted zone is a clean room. 
     
     
         6 . The identification system of  claim 1 , wherein one or more indicators are provided on the main element and wherein said one or more indicators on the main element are also activated by the trigger on the main element. 
     
     
         7 . The identification system of  claim 1 , wherein the one or more auxiliary elements comprise a power source for the machine. 
     
     
         8 . The identification system of  claim 1 , wherein the one or more indicators comprise a visual indicator. 
     
     
         9 . The identification system of  claim 8 , wherein the visual indicator comprises at least one light emitting means. 
     
     
         10 . The identification system of  claim 9 , wherein the visual indicator comprises a flashing light emitting means. 
     
     
         11 . The identification system of  claim 1 , wherein one or more of the indicators are integral with an emergency stop device. 
     
     
         12 . The identification system of  claim 11 , wherein the emergency stop device is an emergency off button (EMO). 
     
     
         13 . The identification system of  claim 1 , wherein the trigger comprises (i) a switch for powering down the main element and/or placing the main element in a non-production mode; and/or (ii) computer software for powering down the main element and/or placing the main element in a non-production mode. 
     
     
         14 . The identification system of  claim 1 , wherein each of the auxiliary elements comprises an indicator. 
     
     
         15 . The identification system of  claim 1 , wherein the main element and each of the auxiliary elements comprise an indicator. 
     
     
         16 . The identification system of  claim 1 , wherein each of the auxiliary elements comprise an emergency stop device. 
     
     
         17 . The identification system of  claim 1 , wherein the main element and each of the auxiliary elements comprise an emergency stop device. 
     
     
         18 . The identification system of  claim 17 , wherein the emergency stop devices are linked such that when an emergency stop device of one element is activated, all elements of the machine are shut down. 
     
     
         19 . The identification system of  claim 18 , wherein each emergency stop device comprises an indicator. 
     
     
         20 . The identification system of  claim 1 , wherein the one or more auxiliary elements comprise a power source for the machine comprising a flashing beacon.