Template assembly and method of producing template assembly

Abstract

The invention is directed to a template assembly configured to hold a workpiece in polishing of the workpiece, including: a PET base; an annular template adhering to an outer circumferential portion of a lower surface of the PET base, the template having an annular notch formed at an upper portion of an inner surface of the template; and a discoid backing pad whose peripheral portion is fitted into the notch, the backing pad adhering to a central portion of the lower surface of the PET base, wherein a recess configured to receive and hold the workpiece during polishing is defined by the inner surface of the template and a lower surface of the backing pad. This template assembly can reduce in-plane variation in depth of the recess and thereby improve flatness of a polished workpiece while inhibiting the occurrence of a scratch and a defect of the workpiece.

1 - 7 . (canceled) 
     
     
         8 . A template assembly configured to hold a workpiece in polishing of the workpiece, comprising:
 a polyethylene terephthalate (PET) base;   an annular template adhering to an outer circumferential portion of a lower surface of the PET base, the template having an annular notch formed at an upper portion of an inner surface of the template; and   a discoid backing pad whose a peripheral portion is fitted into the notch, the backing pad adhering to a central portion of the lower surface of the PET base, wherein a recess configured to receive and hold the workpiece during polishing is defined by the inner surface of the template and a lower surface of the backing pad.   
     
     
         9 . The template assembly according to  claim 8 , wherein the notch has a thickness equal to or less than a target thickness of the backing pad. 
     
     
         10 . The template assembly according to  claim 8 , wherein the template is made of glass epoxy resin. 
     
     
         11 . The template assembly according to  claim 9 , wherein the template is made of glass epoxy resin. 
     
     
         12 . The template assembly according to  claim 8 , wherein in-plane variation in depth of the recess is equal to or less than 10 μm. 
     
     
         13 . The template assembly according to  claim 9 , wherein in-plane variation in depth of the recess is equal to or less than 10 μm. 
     
     
         14 . The template assembly according to  claim 10 , wherein in-plane variation in depth of the recess is equal to or less than 10 μm. 
     
     
         15 . The template assembly according to  claim 11 , wherein in-plane variation in depth of the recess is equal to or less than 10 μm. 
     
     
         16 . A method of producing a template assembly according to  claim 8 , comprising:
 preparing the annular template having the annular notch formed at the upper portion of the inner surface of the template;   sticking the discoid backing pad on the central portion of the PET base; and   sticking the template on the outer circumferential portion of the lower surface of the PET base such that the peripheral portion of the backing pad is fitted into the notch of the template.   
     
     
         17 . A method of producing a template assembly according to  claim 15 , comprising:
 preparing the annular template having the annular notch formed at the upper portion of the inner surface of the template;   sticking the discoid backing pad on the central portion of the PET base; and   sticking the template on the outer circumferential portion of the lower surface of the PET base such that the peripheral portion of the backing pad is fitted into the notch of the template.   
     
     
         18 . The method according to  claim 16 , wherein the step of preparing the template includes:
 preparing a substrate for the template;   cutting the prepared substrate into an annular shape; and then   forming the notch by grinding an upper portion of an inner surface of the annular substrate.   
     
     
         19 . The method according to  claim 17 , wherein the step of preparing the template includes:
 preparing a substrate for the template;   cutting the prepared substrate into an annular shape; and then   forming the notch by grinding an upper portion of an inner surface of the annular substrate.   
     
     
         20 . The method according to  claim 16 , wherein the step of preparing the template includes:
 before forming the notch, lapping and/or polishing the template such that in-plane variation in thickness of the template is equal to or less than 10 μm.   
     
     
         21 . The method according to  claim 17 , wherein the step of preparing the template includes:
 before forming the notch, lapping and/or polishing the template such that in-plane variation in thickness of the template is equal to or less than 10 μm.   
     
     
         22 . The method according to  claim 18 , wherein the step of preparing the template includes:
 before forming the notch, lapping and/or polishing the template such that in-plane variation in thickness of the template is equal to or less than 10 μm.   
     
     
         23 . The method according to  claim 19 , wherein the step of preparing the template includes:
 before forming the notch, lapping and/or polishing the template such that in-plane variation in thickness of the template is equal to or less than 10 μm.