US2016005787A1PendingUtilityA1
Chip package and method for forming the same
Est. expiryJun 11, 2032(~5.9 yrs left)· nominal 20-yr term from priority
H10F 77/93H10F 77/40H10F 39/8063H10F 39/8053H10F 39/811H10F 39/804H10F 39/024H10F 39/026H01L 27/14687H01L 27/14621H01L 27/14632H01L 27/14685H01L 27/14627
56
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Claims
Abstract
An embodiment of the invention provides a chip package which includes: a semiconductor substrate having a first surface and a second surface; a device region disposed in the semiconductor substrate; a dielectric layer disposed on the first surface of the semiconductor substrate; a conducting pad structure disposed in the dielectric layer and electrically connected to the device region, a carrier substrate disposed on the dielectric layer; and a conducting structure disposed in a bottom surface of the carrier substrate and electrically contacting with the conducting pad structure.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A chip package, comprising:
a semiconductor substrate having a first surface and a second surface; a device region disposed in the semiconductor substrate; a dielectric layer disposed on the first surface of the semiconductor substrate; a conducting pad structure disposed in the dielectric layer and electrically connected to the device region; a carrier substrate disposed on the dielectric layer; and a conducting structure disposed on a lower surface of the carrier substrate and electrically contacting with the conducting pad structure.
2 . The chip package as claimed in claim 1 , further comprising an optical element disposed on the second surface of the semiconductor substrate.
3 . The chip package as claimed in claim 2 , wherein the optical element comprises a light filter film, a microlens, or combinations thereof.
4 . The chip package as claimed in claim 2 , further comprising a transparent substrate disposed on the second surface of the semiconductor substrate.
5 . The chip package as claimed in claim 4 , further comprising a spacer layer disposed between the second surface of the semiconductor substrate and the transparent substrate.
6 . The chip package as claimed in claim 1 , wherein the second surface of the semiconductor substrate is a substantially planar surface.
7 . The chip package as claimed in claim 1 , further comprising a hole located in the carrier substrate, wherein the hole exposes the conducting pad structure, and the conducting structure extends into the hole to electrically contact with the conducting pad structure.
8 . A method for forming a chip package, comprising:
providing a semiconductor substrate having a first surface and a second surface, wherein a device region is formed in the semiconductor substrate; disposing a dielectric layer and a conducting pad structure on the first surface of the semiconductor substrate, wherein the conducting pad structure is located in the dielectric layer and completely covered by the dielectric layer; bonding a carrier substrate on the dielectric layer; and forming a conducting structure on a lower surface of the carrier substrate, wherein the conducting structure electrically contacts with the conducting pad structure.
9 . The method for forming a chip package as claimed in claim 8 , further comprising thinning the semiconductor substrate from the second surface of the semiconductor substrate.
10 . The method for forming a chip package as claimed in claim 8 , further comprising removing a portion of the carrier substrate and a portion of the dielectric layer to form a hole exposing the conducting pad structure, wherein the conducting structure extends from the lower surface of the carrier substrate into the hole to electrically contact with the conducting pad structure.
11 . The method for forming a chip package as claimed in claim 8 , further comprising disposing an optical element on the second surface of the semiconductor substrate.
12 . The method for forming a chip package as claimed in claim 11 , wherein the optical element comprises a light filter film, a microlens, or combinations thereof.
13 . The method for forming a chip package as claimed in claim 8 , further
disposing a spacer layer on the second surface of the semiconductor substrate; and disposing a transparent substrate on the spacer layer.
14 . The method for forming a chip package as claimed in claim 8 , not comprising removing a portion of the dielectric layer from a surface of the dielectric layer away from the semiconductor substrate such that the conducting pad structure is exposed before the step of bonding the carrier substrate is performed.Join the waitlist — get patent alerts
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