Electromagnetically-actuated microfluidic flow regulators and related applications

Abstract

A variable, closed-loop apparatus for regulating a microfluidic flow that employs a low-power deflection assembly, which is surface-mounted over a flexible membrane overlying a chamber integrated into a microfabricated platform. A flexible membrane, movable between two positions, sealingly overlies the chamber. One of the positions of the membrane restricts the flow through the chamber to a greater degree than the other position. A deflection assembly disposed on the substrate over the membrane unidirectionally deflects the membrane, thereby regulating the flow through the chamber.

What is claimed is: 
     
         1 . An apparatus for regulating a microfluidic flow, the apparatus comprising:
 a substrate defining a fluid-conducting chamber;   a flexible membrane sealingly overlying the chamber, the membrane movable between a first position and a second position, one of the positions of the membrane restricting the flow through the chamber to a greater degree than the other position; and   an electromagnetically-driven assembly disposed on the substrate over the membrane for unidirectionally deflecting the membrane from the first position to the second position, thereby regulating the flow through the chamber.   
     
     
         2 - 49 . (canceled)