Mems driving device, electronic apparatus, and mems driving method

Abstract

A spectroscopic measurement apparatus includes a fixed substrate, a movable substrate, and a wavelength variable interference filter which includes an electrostatic actuator for changing the gap dimension between the substrates, a vibration disturbance detection unit which detects vibration added to the wavelength variable interference filter, and a bias driving unit which applies a feed-forward voltage based on a detected value of the vibration disturbance detection unit to the electrostatic actuator.

What is claimed is: 
     
         1 . An MEMS driving device comprising:
 an MEMS element that includes a pair of substrates and an electrostatic actuator which changes a gap dimension between the pair of substrates;   a vibration detection unit that detects vibration which is added to the MEMS element; and   an actuator control unit that applies a feed-forward voltage based on a detected value of the vibration detection unit to the electrostatic actuator.   
     
     
         2 . The MEMS driving device according to  claim 1 ,
 wherein the electrostatic actuator includes a bias actuator and a control actuator which is provided independently from the bias actuator, and   wherein the actuator control unit applies the feed-forward voltage to the bias actuator and applies a feed-back voltage according to the gap dimension between the pair of substrates to the control actuator.   
     
     
         3 . The MEMS driving device according to  claim 1 , further comprising:
 a base substrate to which a part of the MEMS element is fixed,   wherein the vibration detection unit detects vibration of the MEMS element with regard to the base substrate.   
     
     
         4 . The MEMS driving device according to  claim 3 ,
 wherein an end of at least one of the pair of substrates is fixed to the base substrate, and   wherein the vibration detection unit detects vibration at a free end on a side which is opposite to the end of the substrate.   
     
     
         5 . The MEMS driving device according to  claim 3 ,
 wherein at least one of the pair of substrates includes a first electrode which faces the base substrate,   wherein the base substrate includes a second electrode which faces the first electrode, and   wherein the vibration detection unit detects the vibration based on an electrostatic capacity between the first electrode and the second electrode.   
     
     
         6 . The MEMS driving device according to  claim 1 ,
 wherein the MEMS element is a wavelength variable interference filter that includes reflection films which are provided on surfaces of the pair of substrates facing each other, and that selects and emits light having a prescribed wavelength from incident light which is incident to the pair of reflection films facing each other.   
     
     
         7 . An electronic apparatus comprising:
 an MEMS driving device including an MEMS element that includes a pair of substrates and an electrostatic actuator which changes a gap dimension between the pair of substrates, a vibration detection unit that detects vibration which is added to the MEMS element, and an actuator control unit that applies a feed-forward voltage based on a detected value of the vibration detection unit to the electrostatic actuator; and   a control unit that controls the MEMS driving device.   
     
     
         8 . An MEMS driving method which drives an MEMS element that includes a pair of substrates and an electrostatic actuator which changes a gap dimension between the pair of substrates, the MEMS driving method comprising:
 detecting vibration which is added to the MEMS element; and   applying a feed-forward voltage based on the detected vibration to the electrostatic actuator.