Substrate processing method

Abstract

A substrate processing method which can improve a throughput by simultaneously processing various types of substrates is disclosed. The substrate processing method includes: dividing substrate holders into a first group and a second group; assigning each one of the substrate holders to either a first recipe or a second recipe; calculating a total transporting time in each of all possible transporting orders of transporting substrates and the substrate holders for performing a first process according to the first recipe and a second process according to the second recipe; determining a transporting order that provides a shortest total transporting time; and performing the first process on one or a plurality of substrates using substrate holders belonging to the first group and performing the second process on one or a plurality of substrates using substrate holders belonging to the second group while transporting the substrates according to the determined transporting order.

What is claimed is: 
     
         1 . A substrate processing method comprising:
 dividing substrate holders into a first group and a second group;   assigning each one of the substrate holders to either a first recipe or a second recipe that establishes substrate processing conditions;   calculating a total transporting time in each of all possible transporting orders of transporting substrates and the substrate holders for performing a first process according to the first recipe and a second process according to the second recipe;   determining a transporting order that provides a shortest total transporting time; and   performing the first process on one or a plurality of substrates using substrate holders belonging to the first group and performing the second process on one or a plurality of substrates using substrate holders belonging to the second group while transporting the substrates according to the determined transporting order.   
     
     
         2 . A substrate processing method comprising:
 dividing substrate holders into holder groups;   dividing substrates into substrate groups according to processing purpose;   assigning each one of the substrate groups to one of the holder groups;   selecting a substrate holder for holding a substrate belonging to each substrate group from a holder group assigned to that substrate group;   repeating the selecting of a substrate holder until the substrate holders are assigned to all of the substrates;   performing a simulation of transporting the substrates and the substrate holders, while calculating a total transporting time from when processing of a first substrate is started to when processing of a final substrate is terminated;   repeating the simulation and the calculating of a total transporting time while changing a transporting order of the substrates and the substrate holders;   determining a transporting order that provides a shortest total transporting time; and   transporting the substrates and the substrate holders according to the determined transporting order.   
     
     
         3 . The substrate processing method according to  claim 2 , wherein dividing the substrates into the substrate groups according to processing purpose comprises dividing substrates into substrate groups according to a thickness of a substrate, a diameter of a substrate, or a shape of cutout portion formed in a substrate. 
     
     
         4 . The substrate processing method according to  claim 2 , further comprising:
 simultaneously processing substrates with several different processing purposes in processing baths.   
     
     
         5 . The substrate processing method according to  claim 2 , wherein:
 substrate numbers are assigned to the substrates; and   the transporting order includes an order in which substrates belonging to a same holder group are transported in the order of increasing the substrate numbers.