Vibration element, manufacturing method thereof, and vibration wave actuator

Abstract

A vibration element includes a substrate, a piezoelectric element including a piezoelectric layer and an electrode layer, and a bonding layer provided between the piezoelectric element and the substrate and comprising ceramic containing melted glass powder, wherein the vibration element causes the substrate to vibrate by vibration energy of the piezoelectric element to output the vibration energy of the substrate, and the piezoelectric element is fixed to the substrate via the bonding layer.

What is claimed is: 
     
         1 . A vibration element, comprising:
 a substrate;   a piezoelectric element including a piezoelectric layer and an electrode layer; and   a bonding layer provided between the piezoelectric element and the substrate and comprising ceramic containing glass,   wherein the electrode layer is fixed to the substrate via the bonding layer,   wherein the bonding layer comprises a compound whose main component is the same as a main component of the piezoelectric layer,   wherein a first concentration of the glass at an interface of the substrate and the bonding layer is greater than a second concentration of glass at a center of the bonding layer,   wherein a third concentration of glass at an interface of the bonding layer and the electrode layer is greater than the second concentration, and   wherein the piezoelectric layer does not contain glass defused from the bonding layer.   
     
     
         2 . The vibration element according to  claim 1 , wherein silicon oxide and boron oxide are contained in the glass and also an additive is added to the glass. 
     
     
         3 . The vibration element according to  claim 1 , wherein the main component is a piezoelectric material. 
     
     
         4 . The vibration element according to  claim 1 , wherein the substrate comprises ceramic or metal. 
     
     
         5 . The vibration element according to  claim 4 , wherein the ceramic forming the substrate includes alumina or ceramic prepared by adding zirconia to alumina as a main component. 
     
     
         6 . The vibration element according to  claim 4 , wherein the metal forming the substrate is stainless steel. 
     
     
         7 . The vibration element according to  claim 1 , wherein the piezoelectric layer comprises lead zirconate and lead titanate as main components, and
 wherein the electrode layer comprises silver and palladium as main components.   
     
     
         8 . The vibration element according to  claim 1 , wherein the piezoelectric layer comprises barium titanate as a main component, and
 wherein the electrode layer comprises silver as a main component.   
     
     
         9 . The vibration element according to  claim 1 , wherein the piezoelectric element comprises the piezoelectric layer and the electrode layer being alternately stacked. 
     
     
         10 . A vibration wave actuator, comprising the vibration element according to  claim 1  as a driving power source. 
     
     
         11 . The vibration element according to  claim 1 , wherein the vibration element causes the substrate to vibrate by vibration energy of the piezoelectric element to output the vibration energy of the substrate. 
     
     
         12 . The vibration element according to  claim 1 , wherein material for the electrode layer is different from material for the substrate. 
     
     
         13 . The vibration element according to  claim 1 , wherein material for the bonding layer is different from any one of material for the electrode layer and material for the substrate.