Container containing a cobalt carbonyl complex and cobalt carbonyl complex composition

Abstract

A container containing a cobalt carbonyl complex and a gas that contains carbon monoxide, and a cobalt carbonyl complex composition comprising a cobalt carbonyl complex and a solvent, wherein the concentration of carbon monoxide dissolved in the solvent is 0.001 to 1 wt %. Since the cobalt carbonyl complex contained in the above container or the above composition can retain its sublimation properties for a long time without being converted into a stable complex, when a cobalt film is formed by chemical vapor deposition using the container and the composition, a high-quality film can be formed by a simple process, and the production cost of the cobalt film can be reduced due to high use efficiency of the precursor.

1 . A container containing a cobalt carbonyl complex and a gas, wherein
 the gas contains carbon monoxide.   
     
     
         2 . The container containing a cobalt carbonyl complex according to  claim 1 , wherein
 the concentration of carbon monoxide in the gas contained in the container is not less than 10 vol %.   
     
     
         3 . The container containing a cobalt carbonyl complex according to  claim 1 , wherein
 the cobalt carbonyl complex is represented by any one of the following formulas (1) to (4):
   CO 2 (CO) 8   (1)
 
   CO 3 (CO) 9 CZ  (2)
 
   (Z is a hydrogen atom, halogen atom, methyl group, methoxy group or trifluoromethyl group.)
   CO 3 (CO) 12   (3)
 
   CO 4 (CO) 12   (4).
 
   
     
     
         4 . The container containing a cobalt carbonyl complex according to  claim 1 , wherein
 the cobalt carbonyl complex is provided to sublimate to form a cobalt film on a substrate, and the container is used to carry out the sublimation of the cobalt carbonyl complex therefrom.   
     
     
         5 . The container containing a cobalt carbonyl complex according to  claim 4 , wherein
 the container has a container body and a gas introduction port and a gas exhaust port formed in the container body.   
     
     
         6 . The container containing a cobalt carbonyl complex according to  claim 4 , wherein
 the container has at least partitions of a filler therein.   
     
     
         7 - 14 . (canceled)