Methods for Discretized Processing and Process Sequence Integration of Regions of a Substrate

Abstract

The present invention provides methods and systems for discretized, combinatorial processing of regions of a substrate such as for the discovery, implementation, optimization, and qualification of new materials, processes, and process sequence integration schemes used in integrated circuit fabrication. A substrate having an array of differentially processed regions thereon is processed by delivering materials to or modifying regions of the substrate.

What is claimed is: 
     
         1 . A processing system for discretized processing of a substrate, the system comprising:
 a stage for holding the substrate;   a processing cell,
 wherein the stage or the processing cell are movable with respect to each other in three dimensions for contacting different site isolated regions on the substrate with the processing cell; 
   a sealing element positioned on a bottom of the processing cell and facing the stage for sealing the processing cell with each of the different site isolated regions; and   a delivery tool for delivering processing fluids to the processing cell.   
     
     
         2 . The processing system of  claim 1 , wherein the processing cell comprises a septum for sealing a top of the processing cell, and wherein the delivery tool comprises a probe for piercing through the septum and delivering the processing fluids to the processing cell through the septum. 
     
     
         3 . The processing system of  claim 2 , wherein the processing cell remains sealed while delivering processing fluids to the processing cell through the septum. 
     
     
         4 . The processing system of  claim 2 , wherein the probe is movable in three dimensions with respect to the processing cell. 
     
     
         5 . The processing system of  claim 2 , wherein the probe comprises a heater. 
     
     
         6 . The processing system of  claim 1 , wherein the delivery tool comprises a pump for delivering processing fluids to the processing cell. 
     
     
         7 . The processing system of  claim 6 , wherein the pump is a syringe pump. 
     
     
         8 . The processing system of  claim 1 , wherein the delivery tool comprises a microprocessor programmed for delivering different ones of the processing fluids to the processing cell and programmed to vary processing conditions among the different isolated regions on the substrate. 
     
     
         9 . The processing system of  claim 1 , wherein the processing cell is supported by a support arm connected to a translation station for moving the processing cell relative to the stage. 
     
     
         10 . The processing system of  claim 1 , wherein the stage is an X-Y-Z translatable stage. 
     
     
         11 . The processing system of  claim 1 , wherein the stage comprises a heater for independently heating each of the different site isolated regions on the substrate. 
     
     
         12 . The processing system of  claim 1 , wherein the processing cell comprises a heating element for controlling a temperature of the processing fluids in the processing cell. 
     
     
         13 . The processing system of  claim 1 , further comprising a rinse line for delivering a rinse fluid to the processing cell. 
     
     
         14 . The processing system of  claim 1 , further comprising a vacuum line for removing the processing fluids from the processing cell. 
     
     
         15 . The processing system of  claim 1 , further comprising a gas purge line for introducing a gas into the processing cell through the processing fluids in the processing cell. 
     
     
         16 . The processing system of  claim 1 , wherein the processing cell comprises an agitation mechanism. 
     
     
         17 . The processing system of  claim 16 , wherein the agitation mechanism utilizes one of a physical stir rod, a magnetically based agitation, a gas based agitation, or a vibration based agitation. 
     
     
         18 . The processing system of  claim 1 , wherein the processing cell has an inner diameter of between about 5 millimeters and 50 millimeters. 
     
     
         19 . The processing system of  claim 1 , further comprising one or more additional processing cells, wherein the processing cell and the one or more additional processing cells form a processing cell array having fixed relative orientations of the processing cell and the one or more additional processing cells in the processing cell array. 
     
     
         20 . The processing system of  claim 19 , wherein the delivery tool comprises a dispensing cell array and a valve array, each aligned with the processing cell array.