Toroidal Plasma Channel with Varying Cross-Section Areas Along the Channel

Abstract

An assembly for adjusting gas flow patterns and gas-plasma interactions including a toroidal plasma chamber. The toroidal plasma chamber has an injection member, an output member, a first side member and a second side member that are all connected. The first side member has a first inner cross-sectional area in at least a portion of the first side member and a second inner cross-sectional area in at least another portion of the first side member, where the first inner cross-sectional area and the second inner-cross-sectional area being different. The second side member has a third inner cross-sectional area in at least a portion of the second side member and a fourth inner cross-sectional area in at least another portion of the second side member, where the third inner cross-sectional area and the fourth inner-cross-sectional area being different.

1 . An assembly for adjusting gas flow patterns and gas-plasma interactions, the assembly comprising:
 a toroidal plasma chamber, wherein the toroidal plasma chamber comprises a first injection member, an output member, a first side member and a second side member, the first side member connecting a first end of the first injection member and the output member and the second side member connecting a second end of the injection member and the output member, wherein:   the first side member has a diameter that is different from the diameter of the second side member; and   a first gas injector for injecting a first gas into the toroidal plasma chamber through the first end of the first injection member and a second gas injector for injection a second gas into the toroidal plasma chamber through the second end of the first injection member, the injection of the first and second gas causing a flow of gas for the formation of plasma within the toroidal plasma chamber, wherein the first gas and the second gas are different gasses.   
     
     
         2 . The assembly of  claim 1 , wherein the first side member and the second side member have a complementary shape. 
     
     
         3 . The assembly of  claim 1 , wherein the first side member and the second side member are parallel. 
     
     
         4 . The assembly of  claim 1 , wherein the first side member and the second side member are removable. 
     
     
         5 . The assembly of  claim 1 , wherein both the first side member and the second side member are connected to the injection member and the output member with a dielectric spacer and a vacuum seal at each joint.