US2015279941A1PendingUtilityA1
Composite Wafer Having a Graphite Core
Est. expirySep 30, 2030(~4.2 yrs left)· nominal 20-yr term from priority
Inventors:Rudolf BergerHermann GruberWolfgang LehnertGuenther RuhlRaimund FoergAnton MauderHans-Joachim Schulze
H10P 14/3461H10P 14/3406H10P 14/2925H10P 14/2901H10P 14/265H10P 90/1906H10P 90/00H10W 10/181H10P 90/1904H10P 90/1914H10D 62/8325H10D 62/832H10D 62/83H10D 62/40H10D 62/00H01L 29/04H01L 29/161
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Claims
Abstract
A composite wafer including a carrier substrate having a graphite core and a monocrystalline semiconductor substrate or layer attached to the carrier substrate and a corresponding method for manufacturing such a composite wafer is provided.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A composite wafer, comprising:
a carrier substrate comprising a graphite core; and a monocrystalline semiconductor substrate selected from silicon carbide and silicon attached to the carrier substrate.
2 . The composite wafer of claim 1 , wherein the carrier substrate comprises turbostratic or amorphous graphite.
3 . The composite wafer of claim 1 , wherein the carrier substrate comprises a semiconductor rim structure laterally surrounding the graphite core.
4 . The composite wafer of claim 1 , wherein the carrier substrate comprises a semiconductor wafer having a recess, wherein the graphite core is disposed in the recess.
5 . A composite wafer, comprising:
a carrier substrate comprising a graphite core and a protective structure encapsulating the graphite core; and a monocrystalline semiconductor layer attached to the carrier substrate.
6 . The composite wafer of claim 5 , wherein the graphite core comprises turbostratic or amorphous graphite.Join the waitlist — get patent alerts
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