Interferometric modulator with dual absorbing layers

Abstract

This disclosure provides systems, methods and apparatus related to an electromechanical display device. In one aspect, an analog interferometric modulator includes a reflective display pixel having a reflector, and a movable first absorbing layer positionable at a distance d 1 from the reflector, the first absorbing layer and the reflector defining a first gap therebetween. The apparatus also includes a second absorbing layer disposed at a distance d 2 from the first absorbing layer, the first absorbing layer disposed between the second absorbing layer and the reflector, the second absorbing layer and the first absorbing layer defining a second gap therebetween. In addition, at least two of the reflector, the first absorbing layer and second absorbing layer are movable to synchronously either increase or decrease the thickness dimension of the first gap and the second gap.

1 .- 32 . (canceled) 
     
     
         33 . An electromechanical display apparatus, comprising:
 a reflective display pixel including:
 a reflective layer; 
 a first partially transmissive absorbing layer disposed from the reflective layer; and 
 a second partially transmissive absorbing layer disposed from the first absorbing layer such that the first absorbing layer is between the second absorbing layer and the reflective layer, and wherein the first absorbing layer is thicker than the second absorbing layer. 
   
     
     
         34 . The apparatus of  claim 33 , wherein at least two of the reflective layer, the first absorbing layer and second absorbing layer are configured to be movable. 
     
     
         35 . The apparatus of  claim 34 , wherein the first absorbing layer and the second absorbing layer are configured to be movable synchronously relative to the reflective layer. 
     
     
         36 . The apparatus of  claim 33 , wherein a first gap is defined between the first absorbing layer and the reflective layer, and a second gap is defined between the second absorbing layer and the first absorbing layer. 
     
     
         37 . The apparatus of  claim 36 , wherein at least one of the first gap and the second gap form an air gap. 
     
     
         38 . The apparatus of  claim 33 , wherein the first absorbing layer and the second absorbing layer include at least one of molybdenum-chromium (MoCr), vanadium (V), germanium (Ge), and tungsten (W). 
     
     
         39 . The apparatus of  claim 38 , wherein at least one of the first absorbing layer and the second absorbing layer include MoCr. 
     
     
         40 . The apparatus of  claim 33 , wherein the sum of the thickness of the first absorbing layer and the second absorbing layer is between about 3 nm and 12 nm. 
     
     
         41 . The apparatus of  claim 33 , wherein the sum of the thickness of the first absorbing layer and the second absorbing layer is between about 5 nm and about 7 nm. 
     
     
         42 . The apparatus of  claim 33 , wherein the first partially transmissive absorbing layer has a thickness between about 2 nm and about 7 nm and the second partially transmissive absorbing layer has a thickness between about 0.5 nm and about 4 nm. 
     
     
         43 . A method of forming an electromechanical display apparatus, comprising:
 forming a reflective layer;   forming a first partially transmissive absorbing layer disposed from the reflective layer; and   forming a second partially transmissive absorbing layer disposed from the first absorbing layer such that the first absorbing layer is between the second absorbing layer and the reflective layer, and wherein the first absorbing layer is thicker than the second absorbing layer.   
     
     
         44 . The method of  claim 43 , further comprising:
 forming a sacrificial layer over the reflective layer;   forming a first support structure;   forming a sacrificial layer over the first partially transmissive absorbing layer;   forming a second support structure; and   forming a first gap between the reflector and the first absorbing layer and a second gap between the first absorbing layer and the second absorbing layer.   
     
     
         45 . An electromechanical display apparatus, comprising:
 a reflective display pixel including:
 a reflective layer; 
 a first partially transmissive absorbing layer having a thickness between about 2 nm and about 7 nm and disposed from the reflective layer; and 
 a second partially transmissive absorbing layer having a thickness between about 0.5 nm and about 4 nm and disposed from the first absorbing layer such that the first absorbing layer is between the second absorbing layer and the reflective layer. 
   
     
     
         46 . The apparatus of  claim 45 , wherein at least two of the reflective layer, the first absorbing layer and second absorbing layer are configured to be movable. 
     
     
         47 . The apparatus of  claim 45 , wherein the first absorbing layer and the second absorbing layer are configured to be movable synchronously relative to the reflective layer. 
     
     
         48 . The apparatus of  claim 45 , wherein a first gap is defined between the first absorbing layer and the reflective layer, and a second gap is defined between the second absorbing layer and the first absorbing layer. 
     
     
         49 . The apparatus of  claim 45 , wherein at least one of the first gap and the second gap form an air gap. 
     
     
         50 . The apparatus of  claim 45 , wherein the first absorbing layer and the second absorbing layer include at least one of molybdenum-chromium (MoCr), vanadium (V), germanium (Ge), and tungsten (W). 
     
     
         51 . The apparatus of  claim 45 , wherein at least one of the first absorbing layer and the second absorbing layer includes MoCr. 
     
     
         52 . The apparatus of  claim 45 , wherein the sum of the thickness of the first absorbing layer and the second absorbing layer is between about 5 nm and about 7 nm. 
     
     
         53 . The apparatus of  claim 45 , wherein the first absorbing layer is thicker than the second absorbing layer.