US2015241784A1PendingUtilityA1

Functional film, liquid immersion member, method of manufacturing liquid immersion member, exposure apparatus, and device manufacturing method

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Assignee: NIKON CORPPriority: Jan 22, 2013Filed: May 8, 2015Published: Aug 27, 2015
Est. expiryJan 22, 2033(~6.5 yrs left)· nominal 20-yr term from priority
Inventors:Tsukasa KishiumeYusuke Taki
Y10T428/24322G03F 7/11Y10T428/31678G03F 7/2041Y10T428/265Y10T442/10G03F 7/70341C04B 35/52
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Claims

Abstract

A mesh member including a base material having a mesh portion and a film of Ti-doped tetrahedral amorphous carbon coated on the mesh portion. An atomic ratio of Ti to C in a composition of the film (ta-C:Ti film) is equal to or greater than 0.03 and equal to or less than 0.09. The atomic ratio of Ti to C is equal to a number of Ti atoms occupying the film divided by a sum of a number of carbon atoms having an sp 3 hybrid orbital and a number of carbon atoms having an sp 2 hybrid orbital occupying the film.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A mesh member comprising:
 a base material having a mesh portion; and   a film of Ti-doped tetrahedral amorphous carbon coated on the mesh portion,   wherein:   an atomic ratio of Ti to C in a composition of the film (ta-C:Ti film) is equal to or greater than 0.03 and equal to or less than 0.09; and   the atomic ratio of Ti to C is equal to a number of Ti atoms occupying the film divided by a sum of a number of carbon atoms having an sp 3  hybrid orbital and a number of carbon atoms having an sp 2  hybrid orbital occupying the film.

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