Modular Flow Cell and Adjustment System

Abstract

A combinatorial processing system having modular dispense heads is provided. The modular dispense heads are disposed on a rail system enabling an adjustable pitch of the modular dispense heads for the combinatorial processing. The modular dispense heads are configured so that sections of the modular dispense heads are detachable in order to accommodate various processes through a first section without having to completely disconnect and re-connect facilities to a second section.

What is claimed is: 
     
         1 . A combinatorial processing system, comprising:
 a reaction chamber configured to define a site-isolated region on a surface of a substrate;   a first dispense head section comprising at least one first channel extending therethrough and at least one valve in fluid communication with the at least one first channel, wherein the first dispense head section is configured to be coupled to at least one processing fluid supply such that the at least one first channel is in fluid communication with the at least one processing fluid supply through the at least one valve; and   a plurality of second dispense head sections, wherein each of the plurality of second dispense head sections comprises at least one second channel extending therethrough and is configured to be partially inserted into the reaction chamber and detachably coupled to the first dispense head section such that the at least one second channel is in fluid communication with the at least one first channel, and wherein each of the plurality of second dispense head sections is configured to perform a process on the site-isolated region using processing fluid from the at least one processing fluid supply different than the others of the plurality of second sections.   
     
     
         2 . The combinatorial processing system of  claim 1 , wherein the first dispense head section comprises a plurality of first channels extending therethrough and a plurality of valves, each of the plurality of valves being in fluid communication with a respective one of the plurality of first channels. 
     
     
         3 . The combinatorial processing system of  claim 2 , wherein the at least one second channel of a first of the plurality of second dispense head sections is configured to deliver processing fluid flowing through the plurality of first channels into the reaction chamber along a first flow path, and the at least one second channel of a second of the plurality of second dispense head sections is configured to deliver processing fluid flowing through the plurality of first channels into the reaction chamber along a second flow path, the second flow path being different than the first flow path. 
     
     
         4 . The combinatorial processing system of  claim 2 , wherein the at least one second channel of a first of the plurality of second dispense head sections is configured to deliver processing fluid flowing through the plurality of first channels into the reaction chamber along a plurality of flow paths, and the at least one second channel of a second of the plurality of second dispense head sections is configured to deliver processing fluid flowing through the plurality of first channels into the reaction chamber along a single flow path. 
     
     
         5 . The combinatorial processing system of  claim 2 , wherein the at least one second channel of a first of the plurality of second dispense head sections is configured to deliver processing fluid flowing through the plurality of first channels into the reaction chamber such that the processing fluid flows radially across the site-isolated region. 
     
     
         6 . The combinatorial processing system of  claim 3 , wherein the at least one second channel of a second of the plurality of second dispense head sections is configured to deliver processing fluid flowing through the plurality of first channels into the reaction chamber such that the processing fluid flows from a first side of the site-isolated region to a second side of the site-isolated region. 
     
     
         7 . The combinatorial processing system of  claim 1 , wherein at least one of the plurality of second dispense head sections further comprises a stirrer configured to stir processing fluid on the site-isolated region within the reaction chamber. 
     
     
         8 . The combinatorial processing system of  claim 7 , wherein the first dispense head section further comprises a drive mechanism, wherein the drive mechanism is coupled to the stirrer when the first dispense head section is coupled to the at least one of the plurality of second dispense head sections, the drive mechanism being configured to cause movement of the stirrer. 
     
     
         9 . The combinatorial processing system of  claim 1 , wherein at least one of the plurality of second dispense head sections further comprises a disc configured to scrub or clean the site-isolated region. 
     
     
         10 . The combinatorial processing system of  claim 1 , wherein at least one of the plurality of second dispense head sections further comprises one or more electrodes or a measurement device. 
     
     
         11 . A combinatorial processing system, comprising:
 a reaction chamber configured to define a site-isolated region on a surface of a substrate;   a first dispense head section comprising at least one first channel extending therethrough, at least one valve in fluid communication with the at least one first channel, and a drive mechanism, wherein the first dispense head section is configured to be coupled to at least one processing fluid supply such that the at least one first channel is in fluid communication with the at least one processing fluid supply through the at least one valve; and   a plurality of second dispense head sections, wherein each of the plurality of second dispense head sections comprises at least one second channel extending therethrough and is configured to be partially inserted into the reaction chamber and detachably coupled to the first dispense head section such that the at least one second channel is in fluid communication with the at least one first channel, and wherein each of the plurality of second dispense head sections is configured to perform a process on the site-isolated region using processing fluid from the at least one processing fluid supply different than the others of the plurality of second sections   wherein each of some of the plurality of second dispense head sections further comprises a movable component positioned within the reaction chamber and coupled to the drive mechanism when the respective ones of the plurality of second dispense head sections are coupled to the first dispense head section, and wherein the drive mechanism is configured to cause movement of the movable component.   
     
     
         12 . The combinatorial processing system of  claim 11 , wherein the first dispense head section comprises a plurality of first channels extending therethrough and a plurality of valves, each of the plurality of valves being in fluid communication with a respective one of the plurality of first channels. 
     
     
         13 . The combinatorial processing system of  claim 12 , wherein the at least one second channel of a first of the plurality of second dispense head sections is configured to deliver processing fluid flowing through the plurality of first channels into the reaction chamber along a first flow path, and the at least one second channel of a second of the plurality of second dispense head sections is configured to deliver processing fluid flowing through the plurality of first channels into the reaction chamber along a second flow path, the second flow path being different than the first flow path. 
     
     
         14 . The combinatorial processing system of  claim 12 , wherein the at least one second channel of a first of the plurality of second dispense head sections is configured to deliver processing fluid flowing through the plurality of first channels into the reaction chamber along a plurality of flow paths, and the at least one second channel of a second of the plurality of second dispense head sections is configured to deliver processing fluid flowing through the plurality of first channels into the reaction chamber along a single flow path. 
     
     
         15 . The combinatorial processing system of  claim 14 , wherein the movable components comprise a stirrer or a disc. 
     
     
         16 . A combinatorial processing system, comprising:
 a substrate support configured to support a substrate;   at least one rail positioned above the substrate support; and   a plurality of flow cells slideably mounted to the at least one rail, wherein each of the plurality of flow cells comprises:   
       a reaction chamber configured to define a respective one of a plurality of site-isolated region on a surface of the substrate; and 
       a dispense head partially inserted into the reaction chamber and comprising: 
       a first section comprising at least one first channel extending therethrough and at least one valve in fluid communication with the at least one first channel, wherein the first section is configured to be coupled to at least one processing fluid supply such that the at least one first channel is in fluid communication with the at least one processing fluid supply through the at least one valve; and 
       a second section comprising at least one second channel extending therethrough and being detachably coupled to the first section such that the at least one second channel is in fluid communication with the at least one first channel,
 wherein the second sections of the dispense heads of the plurality of flow cells are configured such that a process performed on each of the plurality of site-isolated regions using processing fluid from the at least one processing fluid supply is different than the processes performed on the others of the plurality of site-isolated regions. 
 
     
     
         17 . The combinatorial processing system of  claim 16 , wherein the at least one rail comprises a first rail and at least one second rail, wherein the at least one second rail is slideably mounted to the first rail. 
     
     
         18 . The combinatorial processing system of  claim 17 , wherein the plurality of flow cells are slideably mounted to the at least one second rail. 
     
     
         19 . The combinatorial processing system of  claim 18 , wherein the at least one second rail is orthogonal to the first rail. 
     
     
         20 . The combinatorial processing system of  claim 16 , wherein the first section of the dispense head of at least some of the plurality of flow cells comprises a plurality of first channels extending therethrough and a plurality of valves, each of the plurality of valves being in fluid communication with a respective one of the plurality of first channels.