Method and system for laser processing

Abstract

The invention relates to laser cutting, using multiple laser beams directed to a processing region. At least one first laser beam ( 2 ) is coupled into the work piece ( 1 ) material to generate a melt ( 5 ) and to form a keyhole ( 3 ). At least one second beam ( 6 ) is guided onto selected surface regions ( 7 ) of the melt ( 5 ). The laser energy is provided to the processing region as individual beams that may be conditioned independently. The invention has the advantage that arbitrary energy distributions can be arranged in the processing region as determined according to the requirements of the laser cutting process, rather than being limited by an inappropriate beam shape of a single high power laser beam.

1 - 44 . (canceled) 
     
     
         45 . A method for laser cutting of a work piece using multiple laser beams guided to a processing region, comprising:
 generating a melt and forming a keyhole in a work piece using a first laser beam;   guiding at least a second laser beam onto selected surface regions of the melt; and   evaporating material from the melt using the second laser beam, thereby forming a shaped melt flow barrier with a controlled high pressure in a Knudsen layer such that at least a part of the melt is forced out of the processing region in a way that forms a kerf having a cut front and sidewalls,   wherein the first laser beam is guided in front of the second laser beam in the cutting direction, and the first laser beam and the second laser beam are spaced apart from each other on the surface of the work piece.   
     
     
         46 . The method according to  claim 45 , further comprising the step of guiding the second laser beam onto selected surface regions behind the first laser beam. 
     
     
         47 . The method according to  claim 46 , further comprising the step of using the second laser beam to form a melt flow barrier extending transversely of the cutting direction and having a width corresponding to the kerf. 
     
     
         48 . The method according to  claim 47 , wherein the second laser beam forms a melt flow barrier having a concave surface on a side facing towards the first laser beam. 
     
     
         49 . The method according to  claim 47 , wherein the melt flow barrier has a V-shaped cross-section. 
     
     
         50 . The method according to  claim 47 , further comprising the step of forming the melt flow barrier with an arrangement of overlapping sub-beams. 
     
     
         51 . The method according to  claim 49 , further comprising the step of forming the concave melt flow barrier with a V-shape arrangement of overlapping sub-beams comprising at least one first sub-beam having an oblong cross-section forming a first leg of the V-shape, and at least one second sub-beam having an oblong cross-section forming a second leg of the V-shape. 
     
     
         52 . The method according to  claim 47 , wherein the second laser beam is provided through a diffractive optical element (DOE). 
     
     
         53 . The method according to  claim 47 , further comprising the step of providing at least two additional laser beams which follow the second laser beam in the cutting direction in a staggered arrangement, the at least two additional laser beams forming a melt flow barrier extending transversely of the cutting direction and having a width corresponding to the kerf. 
     
     
         54 . The method according to  claim 45 , wherein the second laser beam further comprises at least two additional beams which follow the first laser beam along the sidewalls of the kerf. 
     
     
         55 . The method according to  claim 45 , further comprising the step of forming an inwardly directed flow of melt by following the first laser beam along the sidewalls of the kerf with at least two melt control beams. 
     
     
         56 . The method according to  claim 54 , wherein the at least two additional beams have a beam parameter product selected from the group consisting of less than 10 mm*mrad, less than 5 mm*mrad, less than 1 mm*mrad, and less than 0.5 mm*mrad. 
     
     
         57 . The method according to  claim 54 , wherein each of the at least two additional beams have an instantaneous power fluctuating around an average power, wherein a deviation of instantaneous power from the average power is selected from the group consisting of less than 10%, less than 5%, less than 1%, and less than 0.5% of the average power. 
     
     
         58 . The method according to  claim 54 , wherein each of the at least two additional beams have an instantaneous spatial power density distribution fluctuating around an average power density distribution, wherein a deviation of the instantaneous spatial power density distribution from the average spatial power density distribution in each point is selected from the group consisting of less than 10%, less than 5%, less than 1%, and less than 0.5% of the average power density distribution in that point. 
     
     
         59 . The method according to according to  claim 54 , wherein the at least two additional laser beams are provided from a fibre laser or a disc laser. 
     
     
         60 . The method according to  claim 45 , wherein at least one of the first laser beam and the second laser beam has a beam parameter product selected from the group consisting of less than 10 mm*mrad, less than 5 mm*mrad, less than 1 mm*mrad, and less than 0.5 mm*mrad. 
     
     
         61 . The method according to  claim 60 , wherein at least one of the first laser beam and the second laser beam has an instantaneous power fluctuating around an average power, wherein a deviation of the instantaneous power from the average power is selected from the group consisting of less than 10%, less than 5%, less than 1%, and less than 0.5% of the average power. 
     
     
         62 . The method according to  claim 60 , wherein at least one of the first laser beam and the second laser beam has an instantaneous spatial power density distribution fluctuating around an average power density distribution, wherein the deviation of the instantaneous spatial power density distribution from the average spatial power density distribution in each point is selected from the group consisting of less than 10%, less than 5%, less than 1%, and less than 0.5% of the average energy density distribution in that point. 
     
     
         63 . The method according to  claim 45 , wherein at least one of the first laser beam and the second laser beam is provided by a fibre-laser or a disc-laser. 
     
     
         64 . The method according to  claim 45 , wherein the first laser beam comprises a number of laterally arranged sub-beams. 
     
     
         65 . The method according to  claim 64 , wherein each lateral sub-beam generates a separate keyhole. 
     
     
         66 . The method according to  claim 45 , wherein the first laser beam further comprises a number of sub-beams longitudinally arranged in line with the cutting direction and directed to the keyhole. 
     
     
         67 . The method according to  claim 66 , wherein focal spots of the longitudinally arranged sub-beams are in different vertical levels of the work piece. 
     
     
         68 . The method according to  claim 45 , wherein energy from at least one laser beam is provided in pulses. 
     
     
         69 . The method according to  claim 45 , wherein at least one laser beam is linearly polarised. 
     
     
         70 . The method according to  claim 69 , wherein the first laser beam is linearly polarised in a direction parallel to a plane of incidence of the first laser beam, wherein the plane of incidence at each instant is aligned with a cutting direction. 
     
     
         71 . The method according to  claim 69 , wherein the first laser beam is linearly polarised in a direction perpendicular to a plane of incidence of the first laser beam, wherein the plane of incidence at each instant is aligned with a cutting direction. 
     
     
         72 . The method according to  claim 69 , wherein the linear polarisation of the first laser beam is controlled as a function of an angle enclosed by the plane of incidence and at least one of a cutting direction and an angle of incidence, wherein the angle of incidence and the plane of incidence are defined with respect to a work piece surface normal. 
     
     
         73 . The method according to  claim 69 , wherein at least one laser beam is linearly polarised at a fixed angle with respect to a plane of incidence, an absolute value of said angle selected from the group consisting of between 0° and 90°, between 30° and 60°, and between 40° and 50°, wherein the plane of incidence is defined with respect to a work piece surface normal. 
     
     
         74 . The method according to  claim 69 , wherein the linear polarisation of the at least one laser beam is controlled as a function of laser cutting process parameters, said laser cutting process parameters comprising an angle enclosed by a plane of incidence and at least one of a cutting direction and the angle of incidence, wherein the angle of incidence and the plane of incidence are defined with respect to a work piece surface normal. 
     
     
         75 . The method according to  claim 45 , wherein the method further comprises providing an assist gas jet directed towards the processing region. 
     
     
         76 . The method according to  claim 45 , wherein the first laser beam and the second laser beam overlap underneath the work piece or in an area surrounding the work piece. 
     
     
         77 . The method according to  claim 45 , wherein an additional laser beam overlaps the first laser beam and the second laser beam. 
     
     
         78 . The method according to  claim 77 , wherein the additional laser beam overlaps the first laser beam or the second laser beam. 
     
     
         79 . A system for laser cutting of a work piece, comprising:
 a laser beam emitting apparatus configured to guide multiple laser beams to a processing region via at least one optical unit; and   a motion apparatus configured to move the multiple laser beams relative to the work piece, wherein:   a first laser beam is configured to melt the work piece material and form a keyhole; and   at least a second laser beam is configured to heat selected surface regions of the melt, so as to evaporate material from the surface of the melt and thereby form a shaped melt flow barrier with a controlled high pressure in a Knudsen layer such that at least a part of the melt is forced out of the processing region in a way that forms a kerf having a cut front and sidewalls,   wherein the first laser beam is guided in front of the second laser beam in the cutting direction, and the first laser beam and the second laser beam are spaced apart from each other on surface the work piece.   
     
     
         80 . The system according to  claim 79 , wherein the at least a second laser beam further comprises at least two additional beams which follow the first laser beam along the sidewalls of the kerf. 
     
     
         81 . The system according to  claim 79 , further comprising at least a third and fourth additional beams which follow the first laser beam along the sidewalls of the kerf and form an inwardly directed flow of melt. 
     
     
         82 . The system according to  claim 79 , wherein the laser beam emitting apparatus further comprises at least two laser units each emitting at least one laser beam. 
     
     
         83 . The system according to  claim 79 , wherein the laser beam emitting apparatus further comprises:
 at least one laser configured to emit at least one laser beam; and   a beam splitter configured to split the at least one laser beam into two or more beams.   
     
     
         84 . The system according to  claim 79 , wherein the laser beam emitting apparatus further comprises at least one laser unit emitting a beam having a beam parameter product selected from the group consisting of less than 10 mm*mrad, less than 5 mm*mrad, less than 1 mm*mrad, and less than 0.5 mm*mrad. 
     
     
         85 . The system according to  claim 79 , wherein at least one laser beam is provided by at least one of a fibre laser and a disc laser. 
     
     
         86 . The system according to  claim 79 , further comprising means for providing an assist gas jet to the processing region. 
     
     
         87 . The system according to  claim 79 , wherein the at least one optical unit is configured for collectively rotating at least one laser beam with respect to the at least one work piece around an axis perpendicular to a work piece surface at the processing region. 
     
     
         88 . The system according to  claim 79 , wherein the optical unit further comprises:
 at least one optical input port;   beam collimating optics;   means for collectively rotating the at least one laser beam; and   focusing optics at an output end of the optical unit.   
     
     
         89 . The system according to  claim 88 , wherein the optical unit further comprises:
 a beam splitter;   polarisation rotating elements; and   an optical isolator unit comprising at least one Faraday rotator arranged between the collimating optics and the means for collectively rotating the at least one laser beam.   
     
     
         90 . The system according to  claim 88 , wherein the optical unit further comprises; means for providing an assist gas jet directed to the processing region, said means arranged concentrically around the at least one laser beam at an output end of the optical unit. 
     
     
         91 . The system according to  claim 88 , further comprising computer controlled scanning optics at the output end of the optical unit, said scanning optics configured to deflect the at least one laser beam through focussing optics. 
     
     
         92 . The system according to  claim 79 , wherein the first beam and the second beam overlap underneath the work piece or in an area surrounding the work piece. 
     
     
         93 . The system according to  claim 79 , wherein an additional laser beam overlaps the first laser beam and the second laser beam. 
     
     
         94 . The system according to  claim 93 , wherein the additional beam overlaps the first beam or the second beam. 
     
     
         95 . A method for laser cutting of a work piece using multiple laser beams guided to a processing region, comprising:
 generating a melt and forming a keyhole in a work piece using a first laser beam in a cutting direction parallel to a plane of a surface of the work piece;   guiding at least a second laser beam onto selected surface regions of the melt; and   evaporating material from the melt using the second laser beam, thereby forming a v-shaped melt flow barrier with a controlled high pressure in a Knudsen layer such that at least a part of the melt is forced out of the processing region in a way that forms a kerf having a cut front and sidewalls,   wherein the first laser beam is guided in front of the second laser beam in the cutting direction, and the first laser beam and the second laser beam are spaced apart from each other on surface the work piece.   
     
     
         96 . A method for laser cutting of a work piece using multiple laser beams guided to a processing region, comprising:
 generating a melt and forming a keyhole in a work piece using a first laser beam in a cutting direction parallel to a plane of a surface of the work piece;   guiding at least a second laser beam onto selected surface regions of the melt; and   evaporating material from the melt using the second laser beam, thereby forming a shaped melt flow barrier with a controlled high pressure in a Knudsen layer such that at least a part of the melt is forced out of the processing region in a way that forms a kerf having a cut front and sidewalls;   wherein the second laser beam comprises at least two additional beams which follow the first laser beam along the sidewalls of the kerf, thereby reducing horizontal melt flow leakage along the sidewalls,   wherein the first laser beam is guided in front of the second laser beam in the cutting direction, and the first laser beam and the second laser beam are spaced apart from each other on surface the work piece.   
     
     
         97 . A method for laser cutting of a work piece using multiple laser beams guided to a processing region, comprising:
 generating a melt and forming a keyhole in a work piece using a first laser beam in a cutting direction parallel to a plane of a surface of the work piece;   guiding at least a second laser beam onto selected surface regions of the melt, the second laser beam comprising at least two melt control beams; and   evaporating material from the melt using the second laser beam, thereby forming an inwardly flow of melt by following the first laser beam along sidewalls of a kerf formed by a shaped melt flow barrier,   wherein the first laser beam is guided in front of the second laser beam in the cutting direction, and the first laser beam and the second laser beam are spaced apart from each other on surface the work piece.