Stacked process modules for a semiconductor handling system

Abstract

A substrate transport apparatus having a drive section, an articulated arm operably connected to the drive section, and an end effector connected to the articulated arm, the end effector being configured for holding a substrate thereon and transporting the substrate through articulation of the articulated arm. The end effector is a substantially flat and elongated member, depending from the articulated arm at a base end of the end effector, and extending longitudinally so that the end effector engages edges of the substrate on both proximal and distal sides with respect to the base end. The end effector has a lateral cross section that tapers in a longitudinal portion of the end effector extending between the base end and a distal end of the end effector, the lateral cross section being tapered, along the longitudinal portion, in at least two different directions that are angled and crossing each other.

What is claimed is: 
     
         1 . A substrate transport apparatus comprising:
 a drive section;   an articulated arm operably connected to the drive section to move relative to the drive section; and   an end effector connected to the articulated arm, the end effector being configured for holding a substrate thereon and transporting the substrate through articulation of the articulated arm, wherein the end effector is a substantially flat and elongated member, depending from the articulated arm at a base end of the end effector, and extending longitudinally so that the end effector engages edges of the substrate on both proximal and distal sides with respect to the base end; and   wherein the end effector has a lateral cross section that tapers in a longitudinal portion of the end effector extending between the base end and a distal end of the end effector, the lateral cross section being tapered, along the longitudinal portion, in at least two different directions that are angled and crossing each other.   
     
     
         2 . The substrate transport apparatus of  claim 1 , wherein the articulated arm is a scara arm with 3 or 4 links. 
     
     
         3 . The substrate transport apparatus of  claim 1 , wherein the articulated arm has a frog leg configuration. 
     
     
         4 . The substrate transport apparatus of  claim 1 , wherein the articulated arm has a dual or opposing frog leg configuration. 
     
     
         5 . The substrate transport apparatus of  claim 1 , wherein the articulated arm has more than one end effector, at least one of which has the tapered lateral cross section. 
     
     
         6 . The substrate transport apparatus of  claim 1 , wherein the articulated arm is disposed on a transport cart. 
     
     
         7 . The substrate transport apparatus of  claim 1 , wherein the articulated arm is disposed in a linear tunnel. 
     
     
         8 . The substrate transport apparatus of  claim 1 , wherein the end effector has a passive substrate edge grip that engages and holds the substrate on the end effector. 
     
     
         9 . The substrate transport apparatus of  claim 1 , wherein the tapered lateral cross section is tapered in at least one of the two different directions for a portion of the end effector that extends longitudinally from the base end to at least the distal side engagement of the substrate. 
     
     
         10 . A substrate processing apparatus comprising:
 a frame;   a drive section connected to the frame; and   a substrate transport operably connected to the drive section so that the substrate transport is moved relative to the frame by the drive section, the substrate transport including an end effector configured for holding a substrate on the substrate transport, the end effector includes
 a base member that is cantilevered and extends substantially flat to a free end opposite a cantilevered base end of the base member, 
 a passive grip, mounted to the base member, that engages and supports the substrate so that a flat surface of the substrate stands off from the base member in a direction normal to the flat surface, 
 wherein the base member has a tapered thickness, between the cantilevered base end and the free end, that tapers in a direction aligned with the stand off between the flat surface of the substrate and the base member. 
   
     
     
         11 . The substrate processing apparatus of  claim 10 , wherein the substrate transport is a scara arm with 3 or 4 links. 
     
     
         12 . The substrate processing apparatus of  claim 10 , wherein the substrate transport has a frog leg configuration. 
     
     
         13 . The substrate processing apparatus of  claim 10 , wherein the substrate transport has a dual or opposing frog leg configuration. 
     
     
         14 . The substrate processing apparatus of  claim 10 , wherein the substrate transport has more than one end effector, at least one of which has the tapered thickness. 
     
     
         15 . The substrate processing apparatus of  claim 10 , wherein the substrate transport is disposed on a transport cart. 
     
     
         16 . The substrate processing apparatus of  claim 10 , wherein the substrate transport is disposed in a linear tunnel. 
     
     
         17 . The substrate processing apparatus of  claim 10 , wherein the tapered thickness is tapered in the direction for a portion of the end effector that extends longitudinally from the cantilevered base to the free end. 
     
     
         18 . A substrate processing apparatus comprising:
 a frame;   a substrate transport apparatus connected to the frame;   the substrate transport apparatus including a drive section and at least one articulated arm operably connected to the drive section so that the at least one articulated arm is movable relative to the frame; and   the at least one articulated arm including
 at least one arm link pivotally joined to the drive section at a pivot joint, and 
 an end effector connected to the at least one arm link, the end effector being pivotally joined at a base end of the end effector and extending longitudinally so that the end effector engages a substrate both on proximal and distal sides relative to the base end; 
   wherein the end effector has a lateral cross section that tapers in a longitudinal portion of the end effector extending between the base end and a distal end of the end effector, the lateral cross section being tapered, along the longitudinal portion, in at least two different directions that are angled and crossing each other, and   the at least one arm link has a tapered thickness, between the pivot joint and another end of the at least one arm link, that tapers in a direction substantially normal to the substrate held by the end effector.   
     
     
         19 . The substrate processing apparatus of  claim 18 , wherein all arm links of the at least one articulated arm have the tapered thickness. 
     
     
         20 . The substrate processing apparatus of  claim 18 , wherein the at least one articulated arm has a scara arm configuration with 3 or 4 arm links. 
     
     
         21 . The substrate processing apparatus of  claim 18 , wherein the substrate transport has a frog leg configuration. 
     
     
         22 . The substrate processing apparatus of  claim 18 , wherein the substrate transport has more than one end effector, at least one of which has the tapered lateral cross section. 
     
     
         23 . The substrate processing apparatus of  claim 18 , wherein the substrate transport is disposed on a transport cart. 
     
     
         24 . The substrate processing apparatus of  claim 18 , wherein the substrate transport is disposed in a linear tunnel.