Incorporating additives into fixed abrasive webs for improved cmp performance

Abstract

A structured abrasive article is provided that has a backing having first and second opposed major surfaces and a structured abrasive layer disposed on and secured to the first major surface of the backing. The structured abrasive layer includes a polymeric binder, abrasive particles dispersed in the binder and an additive dispersed in the binder. The additive provides improved chemical mechanical planarization (CMP) polish performance, including high oxide/nitride selectively, high removal rates, lower nitride loss and improved with-in-wafer non-uniformity (WIWNU).

1 . A structured abrasive article comprising:
 a backing having first and second opposed major surfaces;   a structured abrasive layer disposed on and secured to the first major surface, wherein the structured abrasive layer comprises:
 a polymeric binder; 
 abrasive particles dispersed in the binder; and 
 a first additive dispersed in the binder, wherein the first additive is a multidentate acidic complexing agent, 
 wherein the multidentate acidic complexing agent comprises an amino acid, a dipeptide formed from an amino acid and combinations thereof. 
   
     
     
         2 . The structured abrasive article according to  claim 1  wherein the amino acid is selected from the group consisting of: alanine, proline, glycine, histidine, lysine, arginine, ornithene, cysteine, tyrosine, and combinations thereof. 
     
     
         3 . The structured abrasive article according to  claim 2  wherein the amino acid is one of L-proline, L-arginine and combinations thereof. 
     
     
         4 . The structured abrasive article according to  claim 1  wherein the acidic complexing agent constitutes about 0.1 to 3.0% by weight of the structured abrasive layer. 
     
     
         5 . The structured abrasive article according to  claim 1  wherein the abrasive layer further comprises a second additive, wherein the second additive is selected from the group consisting of nonionic surfactant, silicon surfactant, fluorosurfactant, water soluble polymer and combinations thereof. 
     
     
         6 . The structured abrasive article according to  claim 5  wherein the second additive is a nonionic surfactant. 
     
     
         7 . The structured abrasive article according to  claim 6  wherein the nonionic surfactant is a polyether nonionic surfactant. 
     
     
         8 . The structured abrasive article according to  claim 6  wherein the nonionic surfactant constitutes about 0.1 to 3.0% by weight of the structured abrasive layer. 
     
     
         9 . The structured abrasive article according to  claim 6  wherein the nonionic surfactant selected from the group consisting of: linear primary alcohol ethoxylate, secondary alcohol ethoxylate, branched secondary alcohol ethoxylate, octylphenol ethoxylate, acetylenic primary alcohol ethoxylate, acetylenic primary di-alcohol ethoxylate, alkane di-alcohol, hydroxyl-terminated ethylene oxide-propylene oxide random copolymer, fluoroaliphatic polymeric ester, and combinations thereof. 
     
     
         10 . The structured abrasive article according to  claim 6  wherein the nonionic surfactant has a hydrophile-lipophile balance of about 4 and 20. 
     
     
         11 . The structured abrasive article according to  claim 6 , wherein the nonionic surfactant has a hydrophile-lipophile balance of at least about 10. 
     
     
         12 . The structured abrasive article according to  claim 1 , wherein the polymeric binder comprises an acrylic polymer. 
     
     
         13 . A structured abrasive article according to  claim 1 , further comprising an attachment interface layer directly bonded to the second major surface. 
     
     
         14 . A method of abrading a workpiece comprising:
 contacting at least a portion of a structured abrasive article with a surface of a workpiece; and   moving at least one of the workpiece or the structured abrasive layer relative to the other to abrade at least a portion of the surface of the workpiece, wherein the structured abrasive article comprises:
 a backing having first and second opposed major surfaces; and 
 a structured abrasive layer disposed on and secured to the first major surface, wherein the structured abrasive layer comprises:
 a polymeric binder; 
 abrasive particles dispersed in the binder; and 
 
 a first additive dispersed in the binder, wherein the first additive is a multidentate acidic complexing agent, 
 wherein the multidentate acidic complexing agent comprises an amino acid, a dipeptide formed from an amino acid and combinations thereof. 
   
     
     
         15 - 16 . (canceled) 
     
     
         17 . The method according to  claim 14 , wherein the wherein the amino acid is selected from the group consisting of: alanine, proline, glycine, histidine, lysine, arginine, ornithene, cysteine, tyrosine, and combinations thereof. 
     
     
         18 . The method according to  claim 14  wherein the abrasive layer further comprises a second additive, wherein the second additive is selected from the group consisting of nonionic surfactant, silicon surfactant, fluorosurfactant, water soluble polymer and combinations thereof. 
     
     
         19 - 23 . (canceled)