Nano-construction of complex 3-d structures and modification of existing structures

Abstract

In one preferred aspects, methods are provided to produce a three-dimensional feature, comprising:(a) providing a nano-manipulator device; (b) positioning an article with the nano-manipulator device; and (c) manipulating the article to produce the three-dimensional feature. The invention relates to production of nanoscale systems that can be tailored with with specific physical and/or electrical characteristics or need to have these characteristics modified. Methods and apparatus are presented that can construct three-dimensional nanostructures and can also modify existing nanostructures in three dimensions.

What is claimed is: 
     
         1 . A method for producing a three-dimensional feature, comprising:
 (a) providing a nano-manipulator device;   (b) positioning an article with the nano-manipulator device;   (c) manipulating the article to produce the three-dimensional feature.   
     
     
         2 . The method of  claim 1  wherein the article is a microelectronic device, substrate to form a nano-electrical mechanical system; photonic system substrate;
 sensor substrate; or a medical nanodevices. 
 
     
     
         3 . The method of  claim 1  or  2  wherein two or more articles are positioned with the nano-manipulator device. 
     
     
         4 . The method of any one of  claims 1  through  3  wherein a semiconductor chip editing is performed with the nano-manipulator device. 
     
     
         5 . The method of any one of  claims 1  through  4  wherein the mass of the article is increased or decreased by at least 10 percent through positioning with the nano-manipulator device. 
     
     
         6 . The method of any one of  claims 1  through  4  wherein the mass of the article is increased or decreased by at least 30 percent through positioning with the nano-manipulator device. 
     
     
         7 . The method of any one of  claims 1  through  6  wherein a beam-based CVD process is conducted. 
     
     
         8 . A method for producing a three-dimensional feature, comprising increasing or decreasing volume and/or mass of one or more nano-sized articles to produce the three-dimensional feature. 
     
     
         9 . The method of  claim 8  wherein the volume/and mass of one or more articles is increased or decreased by at least 10 percent. 
     
     
         10 . The method of  claim 8  wherein the volume and/or mass of one or more articles is increased or decreased by at least 30 percent. 
     
     
         11 . The method of any one of  claims 8  through  10  wherein the three-dimensional feature is a microelectronic device, substrate to form a nano-electrical mechanical system; photonic system substrate; sensor substrate; or a medical nanodevices. 
     
     
         12 . A method for producing a three-dimensional feature, comprising rigidly affixing two, three, four or more discrete nano-members. 
     
     
         13 . The method of  claim 12  wherein the two or more members are rigidly affixed with a nano-manipulator device. 
     
     
         14 . The method of  claim 12  or  13  wherein the two or more members are nanotubes and/or nanowires.