Radiant Burner

Abstract

A radiant burner and method are disclosed. The radiant burner is for treating an effluent gas stream from a manufacturing process tool and comprises: a combustion chamber having a porous sleeve through which combustion materials pass for combustion proximate to a combustion surface of the porous sleeve; at least one effluent nozzle for ejecting the effluent gas stream into the combustion chamber; and a perforated liner proximate to the combustion surface. Providing a perforated liner controls the combustion materials passing into the combustion chamber to treat the effluent gas stream and also provides a surface onto which residual combustion deposits may be received. Accordingly, the liner can both improve the efficiency of the treatment of the effluent gas stream and can act as a sacrificial surface which may be replaced or cleaned either in accordance with a maintenance regime or when the performance of the radiant burner reduces.

1 . A radiant burner for treating an effluent gas stream from a manufacturing process tool, said radiant burner comprising:
 a combustion chamber having a porous sleeve through which combustion materials pass for combustion proximate to a combustion surface of said porous sleeve;   at least one effluent nozzle for ejecting said effluent gas stream into said combustion chamber; and   a perforated liner accommodated within said combustion chamber adjacent to said combustion surface.   
     
     
         2 . The radiant burner of  claim 1 , wherein said perforated liner comprises an expandable mesh-like structure. 
     
     
         3 . The radiant burner of  claim 2 , comprising an actuator operable to retain said expandable mesh-like structure in a retained position within said combustion chamber and to displace at least one end of said expandable mesh-like structure to an expanded position. 
     
     
         4 . The radiant burner of  claim 3 , wherein said expandable mesh-like structure has a first axial length when in said retained position and second axial length when in said expanded position, wherein said second axial length is greater than said first axial length. 
     
     
         5 . The radiant burner of  claim 3 , wherein said expandable mesh-like structure has an axial length matching that of said combustion chamber when in said retained position and greater than that of said combustion chamber when in said expanded position. 
     
     
         6 . The radiant burner of  claim 2 , wherein said expandable mesh-like structure comprises a coil spring having spacers arranged to space apart adjacent turns when in said retained position. 
     
     
         7 . The radiant burner of  claim 6 , wherein said coil spring is formed from one of a cylindrical and a planar substrate. 
     
     
         8 . The radiant burner of  claim 6 , wherein said spacers comprise at least one of projections from a surface of said coil spring; an annular ring, a ferrule and a wound coil surrounding a surface of said coil spring; and a pleated coil spring having adjacent turns interspaced between adjacent turns of said coil spring. 
     
     
         9 . The radiant burner of  claim 6 , wherein dimensions and locations of said coil spring and spacers are selected to provide a selected hole density of said perforated liner. 
     
     
         10 . The radiant burner of  claim 1 , wherein a density of holes of said perforated liner changes along said axial length. 
     
     
         11 . The radiant burner of  claim 10 , wherein said combustion chamber has a nozzle end proximate to said at least one effluent nozzle and an exhaust end axially distal from said at least one effluent nozzle, said density of said holes of said perforated liner decreases towards said exhaust end. 
     
     
         12 . The radiant burner of  claim 10 , wherein said combustion chamber has an exhaust zone extending axially proximate to said exhaust end, said density of said holes of said perforated liner increases towards said exhaust zone. 
     
     
         13 . The radiant burner of  claim 10 , wherein said combustion chamber has a nozzle zone extending axially proximate to said nozzle end, said density of said holes of said perforated liner decreases towards said nozzle zone. 
     
     
         14 . The radiant burner of  claim 13 , wherein said perforated liner is unperforated proximate to said nozzle zone. 
     
     
         15 . The radiant burner of  claim 10 , comprising a plurality of said nozzles positioned circumferentially around said combustion chamber and wherein said density of said holes of said perforated liner increases circumferentially proximate to said plurality of said nozzles. 
     
     
         16 . The radiant burner of  claim 10 , comprising at least one spray nozzle for ejection of a cleaning fluid onto a cleaning zone of said perforated liner, said density of said holes of said perforated liner decreases towards said cleaning zone. 
     
     
         17 . The radiant burner of  claim 1 , wherein said perforated liner comprises a louvered sheet and louvers of said louvered sheet are orientated to direct said combustion products within said combustion chamber 
     
     
         18 . The radiant burner of  claim 1 , wherein said perforated liner comprises a louvered sheet and louvers of said louvered sheet are orientated to receive on a major surface of said cleaning fluid from said at least one spray nozzle. 
     
     
         19 . The radiant burner of  claim 1 , wherein said perforated liner is axially displaceable between an accommodated position where said perforated liner is accommodated within said combustion chamber and an unaccommodated position where said perforated liner protrudes from said combustion chamber. 
     
     
         20 . The radiant burner of  claim 19 , comprising a cleaning tank for holding a cleaning fluid and wherein said perforated liner extends into said cleaning tank in said unaccommodated position. 
     
     
         21 . The radiant burner of  claim 1 , wherein said perforated liner comprises an aperture for receiving an associated effluent nozzle, displacement of said perforated liner causing movement of said aperture with respect to said associated effluent nozzle to dislodge any effluent treatment deposit located on an outer surface thereof. 
     
     
         22 . A method of treating an effluent gas stream from a manufacturing process tool, said method comprising the steps of:
 passing combustion materials through a porous sleeve of a combustion chamber for combustion proximate to a combustion surface of said porous sleeve;   ejecting said effluent gas stream from at least one effluent nozzle into said combustion chamber; and   providing a perforated liner accommodated within said combustion chamber adjacent to said combustion surface.   
     
     
         23 . A perforated liner for a radiant burner for treating an effluent gas stream from a manufacturing process tool, said radiant burner comprising a combustion chamber having a porous sleeve through which combustion materials pass for combustion proximate to a combustion surface of said porous sleeve; at least one effluent nozzle for ejecting said effluent gas stream into said combustion chamber, said perforated liner being shaped and configured for placement within said combustion chamber adjacent to said combustion surface. 
     
     
         24 . (canceled) 
     
     
         25 . (canceled) 
     
     
         26 . (canceled)