Vacuum pump part and vacuum pump

Abstract

Provided are a vacuum pump part and a vacuum pump suitable for performing adequately the processing of forming a coating on the surface of a fiber-reinforced composite material. In a vacuum pump part, a plating layer, which is a coating serving as a coating layer, is formed on the surface of a second cylindrical member of a cylindrical shape which is constituted by a fiber-reinforced composite material. The plating layer is formed through a removal processing step for removing a surface portion including a parting agent layer from the surface of the second cylindrical member of a cylindrical shape, and a roughening step for roughening a surface of the second cylindrical member after the surface portion including the parting agent layer has been removed.

1 . A vacuum pump part which is made from a fiber-reinforced composite material provided with a coating, wherein
 the coating is formed through   a removal processing step for removing at least a surface portion of the fiber-reinforced composite material, and   a roughening step for roughening a surface of the fiber-reinforced composite material.   
     
     
         2 . The vacuum pump part according to  claim 1 , wherein the removal processing step includes removing the surface portion by dissolving the fiber-reinforced composite material with a chemical. 
     
     
         3 . The vacuum pump part according to  claim 1 , wherein the removal processing step includes removing the surface portion by polishing the fiber-reinforced composite material with a polishing material in which abrasive grains are fixedly attached to a flexible base material. 
     
     
         4 . The vacuum pump part according to  claim 1 , wherein the removal processing step includes removing the surface portion by applying abrasive grains to a flexible base material and polishing the fiber-reinforced composite material. 
     
     
         5 . The vacuum pump part according to  claim 1 , wherein the removal processing step includes removing the surface portion by blasting the fiber-reinforced composite material. 
     
     
         6 . The vacuum pump part according to  claim 1 , wherein the roughening step includes roughening the surface by polishing the fiber-reinforced composite material, from which the surface portion has been removed, with a polishing material in which abrasive grains are fixedly attached to a flexible base material. 
     
     
         7 . The vacuum pump part according to  claim 1 , wherein the roughening step includes roughening the surface by applying abrasive grains to a flexible base material and polishing the fiber-reinforced composite material, from which the surface portion has been removed. 
     
     
         8 . The vacuum pump part according to  claim 1  wherein the roughening step includes roughening the surface by blasting the fiber-reinforced composite material, from which the surface portion has been removed. 
     
     
         9 . The vacuum pump part according to  claim 1 , wherein
 the removal processing step includes removing the surface portion by polishing the fiber-reinforced composite material with a polishing material in which abrasive grains are fixedly attached to a flexible base material, or removing the surface portion by applying abrasive grains to a flexible base material and polishing the fiber-reinforced composite material,   the roughening step includes roughening the surface by polishing the fiber-reinforced composite material, from which the surface portion has been removed, with a polishing material in which abrasive grains are fixedly attached to a flexible base material, or processing of roughening the surface by applying abrasive grains to a flexible base material and polishing the fiber-reinforced composite material, from which the surface portion has been removed, and   a grain size of the abrasive grains used in the roughening step is three or more times a grain size of the abrasive grains used in the removal processing step.   
     
     
         10 . The vacuum pump part according to  claim 1 , wherein
 the removal processing step includes removing the surface portion by blasting the fiber-reinforced composite material,   the roughening step includes roughening the surface by blasting the fiber-reinforced composite material, from which the surface portion has been removed, and   a grain size of a blasting material used for the blasting in the roughening step is three or more times a grain size of a blasting material used for the blasting in the removal processing step.   
     
     
         11 . A rotor for use in a vacuum pump, the rotor comprising:
 a vacuum pump part which is made from a fiber-reinforced composite material provided with a coating, wherein the coating is formed through a removal processing step for removing at least a surface portion of the fiber-reinforced composite material, and a roughening step for roughening a surface of the fiber-reinforced composite material.   
     
     
         12 . A vacuum pump comprising:
 a vacuum pump part which is made from a fiber-reinforced composite material provided with a coating, wherein the coating is formed through a removal processing step for removing at least a surface portion of the fiber-reinforced composite material, and a roughening step for roughening a surface of the fiber-reinforced composite material.   
     
     
         13 . The rotor according to  claim 11 , wherein the removal processing step includes removing the surface portion by at least one of dissolving the fiber-reinforced composite material with a chemical, polishing the fiber-reinforced composite material with a polishing material in which abrasive grains are fixedly attached to a flexible base material, applying abrasive grains to a flexible base material and polishing the fiber-reinforced composite material, or blasting the fiber-reinforced composite material. 
     
     
         14 . The rotor according to  claim 11 , wherein the roughening step includes roughening the surface by at least one of polishing the fiber-reinforced composite material, from which the surface portion has been removed, with a polishing material in which abrasive grains are fixedly attached to a flexible base material; applying abrasive grains to a flexible base material and polishing the fiber-reinforced composite material, from which the surface portion has been removed; or blasting the fiber-reinforced composite material, from which the surface portion has been removed. 
     
     
         15 . The rotor according to  claim 11 , wherein
 the removal processing step includes removing the surface portion by polishing the fiber-reinforced composite material with a polishing material in which abrasive grains are fixedly attached to a flexible base material, or removing the surface portion by applying abrasive grains to a flexible base material and polishing the fiber-reinforced composite material,   the roughening step includes roughening the surface by polishing the fiber-reinforced composite material, from which the surface portion has been removed, with a polishing material in which abrasive grains are fixedly attached to a flexible base material, or processing of roughening the surface by applying abrasive grains to a flexible base material and polishing the fiber-reinforced composite material, from which the surface portion has been removed, and   a grain size of the abrasive grains used in the roughening step is three or more times a grain size of the abrasive grains used in the removal processing step.   
     
     
         16 . The rotor according to  claim 11 , wherein
 the removal processing step includes removing the surface portion by blasting the fiber-reinforced composite material,   the roughening step includes roughening the surface by blasting the fiber-reinforced composite material, from which the surface portion has been removed, and   a grain size of a blasting material used for the blasting in the roughening step is three or more times a grain size of a blasting material used for the blasting in the removal processing step.   
     
     
         17 . The vacuum pump according to  claim 12 , wherein the removal processing step includes removing the surface portion by at least one of dissolving the fiber-reinforced composite material with a chemical, polishing the fiber-reinforced composite material with a polishing material in which abrasive grains are fixedly attached to a flexible base material, applying abrasive grains to a flexible base material and polishing the fiber-reinforced composite material, or blasting the fiber-reinforced composite material. 
     
     
         18 . The vacuum pump according to  claim 12 , wherein the roughening step includes roughening the surface by at least one of polishing the fiber-reinforced composite material, from which the surface portion has been removed, with a polishing material in which abrasive grains are fixedly attached to a flexible base material; applying abrasive grains to a flexible base material and polishing the fiber-reinforced composite material, from which the surface portion has been removed; or blasting the fiber-reinforced composite material, from which the surface portion has been removed. 
     
     
         19 . The vacuum pump according to  claim 12 , wherein
 the removal processing step includes removing the surface portion by polishing the fiber-reinforced composite material with a polishing material in which abrasive grains are fixedly attached to a flexible base material, or removing the surface portion by applying abrasive grains to a flexible base material and polishing the fiber-reinforced composite material,   the roughening step includes roughening the surface by polishing the fiber-reinforced composite material, from which the surface portion has been removed, with a polishing material in which abrasive grains are fixedly attached to a flexible base material, or processing of roughening the surface by applying abrasive grains to a flexible base material and polishing the fiber-reinforced composite material, from which the surface portion has been removed, and   a grain size of the abrasive grains used in the roughening step is three or more times a grain size of the abrasive grains used in the removal processing step.   
     
     
         20 . The vacuum pump according to  claim 12 , wherein
 the removal processing step includes removing the surface portion by blasting the fiber-reinforced composite material,   the roughening step includes roughening the surface by blasting the fiber-reinforced composite material, from which the surface portion has been removed, and   a grain size of a blasting material used for the blasting in the roughening step is three or more times a grain size of a blasting material used for the blasting in the removal processing step.