Polishing end point detection method and polishing end point detection apparatus

Abstract

There is provided a polishing end point detection method of improving the accuracy of detecting a polishing end point. The polishing end point detection method emits light toward a polishing object including a hybrid film made of a nanocarbon material and a light-transmissive material while polishing the polishing object (Step S 102 ). Then, the polishing end point detection method receives light reflected from the polishing object (Step S 103 ). Then, the polishing end point detection method subjects the received reflected light to signal processing (Step S 104 ). Then, the polishing end point detection method determines the polishing end point of the polishing object based on the result of the signal processing (Step S 105 ), and detects the polishing end point (Step S 106 ).

What is claimed is: 
     
         1 . A polishing end point detection method comprising the steps of:
 emitting light to a polishing object including a hybrid film made of a nanocarbon material and a light-transmissive material while polishing the polishing object; and   detecting a polishing end point of the polishing object based on light reflected from the polishing object.   
     
     
         2 . The polishing end point detection method according to  claim 1 , wherein
 the step of detecting the polishing end point of the polishing object detects the polishing end point of the polishing object using optical interferometry for measuring a film thickness of the polishing object based on a phase difference in light reflected from the polishing object.   
     
     
         3 . The polishing end point detection method according to  claim 1 , wherein
 the step of detecting the polishing end point of the polishing object detects the polishing end point of the polishing object based on a change in intensity of a composite wave obtained by combining the light reflected from a plurality of reflecting surfaces of the polishing object and a polishing rate of the polishing object.   
     
     
         4 . The polishing end point detection method according to  claim 1 , wherein
 the step of detecting the polishing end point detects the polishing end point of the polishing object based on a change in optical spectrum of the light reflected from the polishing object.   
     
     
         5 . The polishing end point detection method according to  claim 4 , wherein
 the step of detecting the polishing end point detects the polishing end point of the polishing object based on a result of comparison between a preset optical spectrum waveform and an optical spectrum waveform of the light reflected from the polishing object.   
     
     
         6 . The polishing end point detection method according to  claim 1 , wherein
 the nanocarbon material includes a graphene sheet or a carbon nanotube.   
     
     
         7 . A polishing end point detection apparatus comprising:
 a light emitting unit configured to emit light toward a polishing object including a hybrid film made of a nanocarbon material and a light-transmissive material;   a light receiving unit configured to receive light reflected from the polishing object; and   a detection unit configured to detect the polishing end point of the polishing object based on the light received by the light receiving unit.   
     
     
         8 . The polishing end point detection apparatus according to  claim 7 , wherein
 the detection unit detects the polishing end point of the polishing object using optical interferometry for measuring a film thickness of the polishing object based on a phase difference in light reflected from the polishing object.   
     
     
         9 . The polishing end point detection apparatus according to  claim 7 , wherein
 the detection unit detects the polishing end point of the polishing object based on a change in intensity of a composite wave obtained by combining the light reflected from a plurality of reflecting surfaces of the polishing object and a polishing rate of the polishing object.   
     
     
         10 . The polishing end point detection apparatus according to  claim 7 , wherein
 the detection unit detects the polishing end point of the polishing object based on a change in optical spectrum of the light reflected from the polishing object.   
     
     
         11 . The polishing end point detection apparatus according to  claim 10 , wherein
 the detection unit detects the polishing end point of the polishing object based on a result of comparison between a preset optical spectrum waveform and an optical spectrum waveform of the light reflected from the polishing object.   
     
     
         12 . The polishing end point detection apparatus according to  claim 7 , wherein
 the nanocarbon material includes a graphene sheet or a carbon nanotube.   
     
     
         13 . The polishing end point detection method according to  claim 2 , wherein
 the step of detecting the polishing end point of the polishing object detects the polishing end point of the polishing object based on a change in intensity of a composite wave obtained by combining the light reflected from a plurality of reflecting surfaces of the polishing object and a polishing rate of the polishing object.   
     
     
         14 . The polishing end point detection method according to  claim 2 , wherein
 the step of detecting the polishing end point detects the polishing end point of the polishing object based on a change in optical spectrum of the light reflected from the polishing object.   
     
     
         15 . The polishing end point detection method according to  claim 3 , wherein
 the step of detecting the polishing end point detects the polishing end point of the polishing object based on a change in optical spectrum of the light reflected from the polishing object.   
     
     
         16 . The polishing end point detection apparatus according to  claim 8 , wherein
 the detection unit detects the polishing end point of the polishing object based on a change in intensity of a composite wave obtained by combining the light reflected from a plurality of reflecting surfaces of the polishing object and a polishing rate of the polishing object.   
     
     
         17 . The polishing end point detection apparatus according to  claim 8 , wherein
 the detection unit detects the polishing end point of the polishing object based on a change in optical spectrum of the light reflected from the polishing object.   
     
     
         18 . The polishing end point detection apparatus according to  claim 9 , wherein
 the detection unit detects the polishing end point of the polishing object based on a change in optical spectrum of the light reflected from the polishing object.