Multilayer thin film for ceramic electronic component and method for manufacturing the same

Abstract

There are provided a multilayer thin film for a ceramic electronic component and a method of manufacturing the same. The multilayer thin film includes a substrate; and a ceramic layer and a metal layer alternately formed on at least one of upper and lower surfaces of the substrate, wherein at least one of the ceramic layer and the metal layer has a height corresponding to a thickness of at least one of a plurality of particles arranged on a plane. With the multilayer thin film for a ceramic electronic component, the number of layers increases and a distance between electrodes decreases, whereby capacitance may increase.

What is claimed is: 
     
         1 . A method of manufacturing a multilayer thin film for a ceramic electronic component, the method comprising:
 preparing a substrate; and   alternately forming a ceramic layer and a metal layer on at least one of upper and lower surfaces of the substrate, wherein at least one of the ceramic layer and the metal layer has a height corresponding to a thickness of at least one of a plurality of particles arranged on a plane.   
     
     
         2 . The method of  claim 1 , wherein the alternately forming the ceramic layer and the metal layer on at least one of the upper and lower surfaces of the substrate includes:
 preparing a first solution containing metal oxide nano particles charged with a charge;   preparing a second solution containing metal nano particles charged with a charge having a polarity opposite to that of the charge of the metal oxide nano particles; and   alternately forming at least one ceramic layer and one metal layer on at least one of the upper and lower surfaces of the substrate by repeating an operation of alternately immersing the substrate charged with a charge in the first and second solutions.   
     
     
         3 . The method of  claim 1 , wherein the substrate is charged with a charge having a polarity opposite to that of a charge of particles adjacent thereto. 
     
     
         4 . The method of  claim 2 , wherein the preparing of the first solution is performed by dispersing the metal oxide nano particles into a solution having ceramic precursors dissolved therein. 
     
     
         5 . The method of  claim 2 , wherein a metal oxide in the first solution includes at least one selected from a group consisting of magnesium (Mg), calcium (Ca), strontium (Sr), barium (Ba), lanthanum (La), titanium (Ti), and zirconium (Zr). 
     
     
         6 . The method of  claim 2 , wherein a metal in the second solution includes at least one selected from a group consisting of silver (Ag), lead (Pb), platinum (Pt), nickel (Ni), and copper (Cu). 
     
     
         7 . The method of  claim 2 , wherein the repeating of the operation of alternately immersing the substrate in the first and second solutions includes cleaning the substrate with deionized distilled water and drying the substrate, after immerging the substrate in one of the first and second solutions, and before immerging the substrate in the other solution. 
     
     
         8 . The method of  claim 1 , wherein the ceramic layer has a thickness of 400 nm or less. 
     
     
         9 . The method of  claim 1 , wherein the metal layer has a thickness of 500 nm or less.