US2015155202A1PendingUtilityA1
Power/ground layout for chips
Est. expiryOct 20, 2030(~4.2 yrs left)· nominal 20-yr term from priority
H10W 90/756H10W 90/754H10W 90/726H10W 90/722H10W 74/111H10W 74/00H10W 72/5525H10W 72/5524H10W 72/5522H10W 72/952H10W 72/944H10W 72/851H10W 72/552H10W 72/075H10W 72/59H10W 72/29H10W 72/01H10W 90/00H10W 72/072H10W 20/427H10W 20/42H10W 70/60H10W 20/063H10W 72/00H01L 2924/01029H01L 24/81H01L 24/85H01L 2924/014H01L 21/76885H01L 25/50
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Claims
Abstract
Embodiments of the present disclosure provide a chip that comprises a base metal layer formed over a first semiconductor die and a first metal layer formed over the base metal layer. The first metal layer includes a plurality of islands configured to route at least one of (i) a ground signal or (ii) a power signal in the chip. The chip further comprises a second metal layer formed over the first metal layer. The second metal layer includes a plurality of islands configured to route at least one of (i) the ground signal or (ii) the power signal in the chip.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A method of fabricating a chip, the method comprising:
forming a base metal layer over a first semiconductor die; forming a first metal layer that is separate from the base metal layer; creating a first island in the first metal layer to route at least one of (i) a ground signal or (ii) a power signal in the first semiconductor die, wherein the first island is defined by an opening in the first metal layer that surrounds the first island; forming a second metal layer that is separate from the first metal layer; and creating a second island in the second metal layer to route at least one of (i) the ground signal or (ii) the power signal in the first semiconductor die, wherein the second island is defined by an opening in the second metal layer that surrounds the second island.
2 . The method of claim 1 , further comprising:
prior to forming the second metal layer, placing a dielectric material (i) on the first metal layer and (ii) in the opening in the first metal layer such that the first island in the first metal layer is surrounded along the entire periphery of the first island by the dielectric material.
3 . The method of claim 2 , further comprising:
placing a passivation material (i) on the second metal layer and (ii) in the opening in the second metal layer such that the second island in the second metal layer is surrounded along the entire periphery of the second island by the passivation material.
4 . The method of claim 3 , wherein placing the passivation material on the second metal layer forms a passivation layer, and wherein the method further comprises:
forming openings in the passivation layer to expose portions of the second metal layer.
5 . The method of claim 3 , wherein placing the passivation material on the second metal layer forms a passivation layer, and wherein the method further comprises:
forming an opening in the passivation layer to expose the second island in the second metal layer.
6 . The method of claim 1 , wherein the second metal layer is separated from the first metal layer by a dielectric layer.
7 . The method of claim 1 , wherein the first metal layer comprises at least one of copper (Cu), aluminum (Al), aluminum-silicon alloy, aluminum-copper alloy, or nickel (Ni), and wherein the second metal layer comprises at least one of copper (Cu), aluminum (Al), aluminum-silicon alloy, aluminum-copper alloy, or nickel (Ni).
8 . The method of claim 1 , further comprising providing one or more bond pads that are in electrical contact with the second metal layer, the bond pads to transmit signals between the first semiconductor die and one or more external devices.
9 . The method of claim 1 , further comprising providing an electrical pathway to transmit the power signal in the first semiconductor die from the second metal layer to the base metal layer via the island in the first metal layer.
10 . The method of claim 1 , further comprising providing an electrical pathway to transmit the ground signal in the first semiconductor die from the first metal layer to a stacked die via the island in the second metal layer.
11 . The method of claim 1 , further comprising:
positioning the first semiconductor die on a lead frame of a package; and stacking a second semiconductor die on top of the first semiconductor die.
12 . The method of claim 1 , further comprising:
forming a passivation layer over the second metal layer; creating one or more openings in the passivation layer to expose contact points in the second metal layer; stacking a second semiconductor die on the passivation layer; and electrically coupling the second semiconductor die to the first semiconductor die via the one or more openings in the passivation layer.
13 . The method of claim 12 , wherein the second semiconductor die is electrically coupled to the second metal layer through a solder bump.
14 . The method of claim 12 , wherein the second semiconductor die is electrically coupled to the second metal layer through a copper pillar and a solder bump.
15 . The method of claim 1 , wherein creating the second island in the second metal layer further comprises:
creating the second island in the second metal layer to be aligned vertically with the first island in the first metal layer.
16 . The method of claim 1 , wherein creating the first island in the first metal layer further comprises:
creating the first island in a center location of the first metal layer.
17 . The method of claim 1 , wherein:
the first metal layer is a ground plane; and the second metal layer is a power plane.
18 . A method of fabricating a chip, the method comprising:
forming a base metal layer over a first semiconductor die; forming a first metal layer that includes a plurality of islands individually surrounded along their entire periphery by a dielectric material, wherein the plurality of islands are to route at least one of (i) a ground signal or (ii) a power signal in the first semiconductor die, and wherein the first metal layer is electrically separate from the base metal layer; forming an electrically insulating layer on the first metal layer; and forming a second metal layer on the electrically insulating layer, wherein the second metal layer includes a plurality of islands individually surrounded along their entire periphery by a passivation material, wherein the plurality of islands are to route at least one of (i) a ground signal or (ii) a power signal in the first semiconductor die.
19 . The method of claim 18 , wherein the electrically insulating layer comprises the dielectric material.
20 . The method of claim 18 , further comprising:
forming a passivation layer on the second metal layer, wherein the passivation layer comprises the passivation material that surrounds the islands of the second metal layer; and forming one or more openings in the passivation layer to expose at least one of the plurality of islands in the second metal layer.Join the waitlist — get patent alerts
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