Substrate processing system, substrate processing apparatus, data processing method, and storage medium

Abstract

A substrate processing system includes a substrate processing apparatus for generating apparatus data on substrate processing and a management apparatus connected to at least one substrate processing apparatus via a network for receiving and storing the apparatus data periodically reported from the substrate processing apparatus. The substrate processing apparatus includes a storage unit for storing the apparatus data a report cycle or the number of reports of the apparatus data to the management apparatus, and a degree of importance of the apparatus data in association with a data type of the apparatus data, and a control unit for, when changing a report cycle of the apparatus data, determining a data type of the report cycle of which is to be changed based on the report cycle or the number of reports and the degree of importance per data type stored in the storage unit.

1 . A substrate processing system comprising a substrate processing apparatus for generating apparatus data on substrate processing, and a management apparatus connected to at least one substrate processing apparatus via a network and for receiving and storing the apparatus data periodically reported from the substrate processing apparatus,
 wherein the substrate processing apparatus comprises a storage unit for storing the apparatus data generated inside the substrate processing apparatus, a report cycle or the number of reports of the apparatus data to the management apparatus, and a degree of importance of the apparatus data in association with a data type of the apparatus data, and a control unit for, when changing a report cycle of the apparatus data, determining a data type of the report cycle of which is to be changed based on the report cycle or the number of reports and the degree of importance per data type stored in the storage unit.   
     
     
         2 . The substrate processing system according to  claim 1 ,
 wherein the management apparatus instructs the substrate processing apparatus to prolong a report cycle of the apparatus data when a data transmission load of the network is excessively high.   
     
     
         3 . A substrate processing apparatus for generating and periodically reporting apparatus data on substrate processing, the apparatus comprising a storage unit for storing the apparatus data generated inside the substrate processing apparatus, a report cycle or the number of reports of the apparatus data, and a degree of importance of the apparatus data in association with a data type of the apparatus data, and a control unit for, when changing a report cycle of the apparatus data, determining a data type of the report cycle of which is to be changed based on the report cycle or the number of reports and the degree of importance per data type stored in the storage unit. 
     
     
         4 . A data processing method in a substrate processing apparatus comprising a storage unit for storing at least apparatus data on a substrate processing, and a control unit for periodically reporting the apparatus data,
 wherein the control unit performs a step of collecting the apparatus data, a step of storing the collected apparatus data, a report cycle or the number of reports of the apparatus data, and a degree of importance of the apparatus data in association with a data type of the apparatus data, and a data type determination step of, when changing a report cycle of the apparatus data, determining a data type of the report cycle of which is to be changed based on the report cycle or the number of reports and the degree of importance stored per data type.   
     
     
         5 . A storage medium capable of reading a data report program to perform a processing of reporting apparatus data on substrate processing to a management apparatus, a processing of storing the apparatus data, a report cycle or the number of reports of the apparatus data to the management apparatus, and a degree of importance of the apparatus data in association with a data type of the apparatus data, and a data type determination processing of, when changing a report cycle of the apparatus data, determining a data type of the report cycle of which is to be changed based on the report cycle or the number of reports and the degree of importance stored per data type.