Angular velocity sensor and angular velocity and acceleration detecting composite sensor

Abstract

A placing member is configured to be supported from an outside by a terminal electrically connected to a terminal electrode, and an X-axis-direction extended portion, a Y-axis-direction extended portion, and a Z-axis-direction extended portion are provided in the terminal. This configuration provides an angular velocity sensor, in which a problem such that Y-axis-direction and Z-axis-direction vibrations applied from the outside cannot be damped is eliminated, and all the vibrations in three axis directions can be damped.

What is claimed is: 
     
         1 . An angular velocity sensor comprising:
 an angular velocity sensor element including a GND electrode, a driving electrode, and a detection electrode;   a case accommodating the angular velocity sensor element to ensure a vibrating space of the angular velocity sensor element; and   a first lead and a second lead connected to the case respectively, wherein   the first lead includes a portion inserted in the case and a first end extended into the case,   the first end is connected to at least one of the GND electrode, the driving electrode, and the detection electrode via a first metal wire,   the first lead includes first and second bending portions in an outer side of the case,   the second lead includes a portion inserted in the case and a second end extended into the case,   the second end is connected to at least one of the GND electrode, the driving electrode, and the detection electrode via a second metal wire,   the second lead includes third and a fourth bending portions in an outer side of the case,   the first metal wire is bended at the first and second bending portions in a direction away from a plane being substantially parallel with the angular velocity sensor element, and   the second metal wire is bended at the third and the fourth bending portions in a direction away from the plane.   
     
     
         2 . The angular velocity sensor according to  claim 1 , wherein
 the first lead and the second lead include a portion extending along a X-axis direction, a portion extending along a Y-axis direction, and a portion extending along a Z-axis direction respectively,   the X-axis direction and the Y-axis direction are parallel with the plane, and the X-axis direction, the Y-axis direction, and the Z-axis direction being orthogonal to each other.   
     
     
         3 . The angular velocity sensor according to  claim 1 , wherein the angular velocity sensor element includes a first arm and a second arm. 
     
     
         4 . The angular velocity sensor according to  claim 1 , wherein the angular velocity sensor element includes a first arm and a second arm, the first and the second arm configured to be driven in the plane. 
     
     
         5 . The angular velocity sensor according to  claim 1 , wherein
 the angular velocity sensor element includes a first arm and a second arm,   the first and the second arm are configured to be driven in the plane, and   an angular velocity is detected by detecting Coriolis Force corresponding to the driving of the first arm and the second arm.   
     
     
         6 . The angular velocity sensor according to  claim 1 , wherein the angular velocity sensor element includes:
 a substrate;   a common electrode disposed on the substrate; and   a piezoelectric layer disposed on the common electrode,   wherein the GND electrode, the driving electrode, and the detection electrode are disposed on the piezoelectric layer.   
     
     
         7 . The angular velocity sensor according to  claim 1 , further comprising an IC configured to process an output signal outputted from the detection electrode. 
     
     
         8 . An angular velocity and acceleration detecting composite sensor comprising:
 the angular velocity sensor according to  claim 1 ;   an acceleration sensor element that detects acceleration; and   an IC configured to process an acceleration output signal generated from the acceleration sensor element.