Aqueous processing liquid

Abstract

An aqueous processing liquid used for cutting a fragile material using a wire saw contains a water-soluble polymer, in which the water-soluble polymer has a mass average molecular weight in a range of 3×10 3 to 6×10 5 , and the aqueous processing liquid exhibits a viscosity at 25 degrees C. in a range of 1.5 mPa·s to 15 Pa·s.

1 . An aqueous processing liquid used for cutting a fragile material using a wire saw, comprising:
 a water-soluble polymer, wherein   the water-soluble polymer has a mass average molecular weight in a range of 3×10 3  to 6×10 5 , and   the aqueous processing liquid exhibits a viscosity at 25 degrees C. in a range of 1.5 mPa·s to 15 Pa·s.   
     
     
         2 . The aqueous processing liquid according to  claim 1 , wherein
 the wire saw is a fixed abrasive grain wire saw.   
     
     
         3 . The aqueous processing liquid according to  claim 2 , wherein
 the fixed abrasive grain wire saw has a wire diameter of 0.2 mm or less.   
     
     
         4 . The aqueous processing liquid according to  claim 1 , wherein
 a content of the water-soluble polymer is in a range of 0.5 mass % to 40 mass % of a total amount of the processing liquid.   
     
     
         5 . The aqueous processing liquid according to  claim 1 , further comprising:
 at least one of a rust inhibitor, friction modifier, antifoaming agent, metal deactivator, bactericide (preservative) and pH adjuster.   
     
     
         6 . The aqueous processing liquid according to  claim 1 , wherein
 the fragile material is a silicon ingot.