Photoresist canister liner

Abstract

The disclosure discloses a photoresist canister liner comprises a liner body for containing photoresist comprising an upper portion and a tapered lower portion; an opening portion disposed at a top of the upper portion and comprising a photoresist outlet; and a diptube communicating with the photoresist outlet and inserted in the liner body and extending to a bottom of the lower portion. The lower portion of the liner body of the photoresist canister liner in the disclosure has diminishing section area, the photoresist can flow to the bottom of the liner body along the tapered lower portion and is collected in the bottom of the liner body, which prevents photoresist being wasted.

What is claimed is: 
     
         1 . A photoresist canister liner comprising:
 a liner body having an upper portion and a tapered lower portion, the liner body being configured to contain photoresist;   an opening portion having a photoresist outlet, the opening portion being configured to dispose at a top of the upper portion;   a diptube communicating with the photoresist outlet and inserted in the liner body, and extending to a bottom of the lower portion.   
     
     
         2 . The photoresist canister liner according to  claim 1 , wherein the liner body has a cone shape comprising a top surface , the opening portion is located at the top surface. 
     
     
         3 . The photoresist canister liner according to  claim 1 , wherein the lower portion of the liner body has a cone shape, and the bottom of the lower portion forms a sharp corner. 
     
     
         4 . The photoresist canister liner according to  claim 1 , wherein the lower portion of the liner body is a frustum of cone. 
     
     
         5 . The photoresist canister liner according to  claim 1 , wherein the bottom of the lower portion of the liner body forms a round corner. 
     
     
         6 . The photoresist canister liner according to  claim 3 , wherein the upper portion of the liner body has a column shape. 
     
     
         7 . The photoresist canister liner according to  claim 3 , wherein the upper portion of the liner body has a cuboid shape. 
     
     
         8 . The photoresist canister liner according to  claim 1 , wherein the photoresist canister liner is capable of being disposed inside a photoresist canister with a top opening of a photo-etching machine, the opening portion of the photoresist canister liner is fixedly connected to the top of the photoresist canister, air entering the photoresist canister from the top opening is capable of squeezing the photoresist canister liner from outside of the photoresist canister liner and squeezing the photoresist out from the top opening. 
     
     
         9 . The photoresist canister liner according to  claim 1 , wherein the liner body is made of plastic.