Chemical liquid container replacement device, container mounting module, chemical liquid container replacement method, and substrate processing apparatus

Abstract

In a chemical liquid container replacement device D2 configured to replace a chemical liquid container 50 , multiple chemical liquid containers 50 respectively connected to base end sides of chemical liquid supply paths configured to supply chemical liquids, and a nozzle attachment/detachment device 61 is configured to attach/detach the base end side of the chemical liquid supply path with respect to the chemical liquid container 50 of a container arrangement section 60 . A loading/unloading port 62 loads a new chemical liquid container 50 for performing a liquid process on a substrate W and unloads a completely used chemical liquid container 50 . A container transfer device 7 unloads the completely used chemical liquid container 50 from the container arrangement section 60 toward the loading/unloading port 62 and loads the new chemical liquid containers 50 from the loading/unloading port 62 toward the container arrangement section 60.

We claim: 
     
         1 . A chemical liquid container replacement device comprising:
 a container arrangement section in which multiple chemical liquid containers respectively connected with base end sides of chemical liquid supply paths are arranged;   an attachment/detachment device configured to attach and detach the base end side of the chemical liquid supply path with respect to the chemical liquid container arranged in the container arrangement section;   a loading/unloading port through which a new chemical liquid container storing therein a chemical liquid to perform a liquid process on a substrate is loaded and a completely used chemical liquid container is unloaded; and   a container transfer device configured to unloaded the completely used chemical liquid container from the container arrangement section through the loading/unloading port and load the new chemical liquid container into the container arrangement section through the loading/unloading port.   
     
     
         2 . The chemical liquid container replacement device of  claim 1 , further comprising:
 a cover opening/closing device configured to close a chemical liquid suction opening of the completely used chemical liquid container, from which the chemical liquid supply path is separated, with a cover, and configured to open a chemical liquid suction opening of the new chemical liquid container by separating a cover of the new chemical liquid container.   
     
     
         3 . The chemical liquid container replacement device of  claim 2 ,
 wherein the cover opening/closing device is provided to open and close a cover of a chemical liquid container arranged in the container arrangement section.   
     
     
         4 . The chemical liquid container replacement device of  claim 1 ,
 wherein a transfer region of the container transfer device and the container arrangement section are provided within a space partitioned from an external atmosphere.   
     
     
         5 . The chemical liquid container replacement device of  claim 4 , further comprising:
 a gas supply device configured to supply a clean gas into the space partitioned from the external atmosphere.   
     
     
         6 . The chemical liquid container replacement device of  claim 4 , further comprising:
 an inert gas supply device configured to supply an inert gas into the space partitioned from the external atmosphere.   
     
     
         7 . The chemical liquid container replacement device of  claim 1 ,
 wherein the container arrangement section is formed of a container rack in which multiple plates for horizontally arranging the multiple chemical liquid containers are vertically stacked.   
     
     
         8 . The chemical liquid container replacement device of  claim 1 ,
 wherein multiple arrangement regions where the chemical liquid containers are respectively provided are horizontally arranged in the container arrangement section, and   the container arrangement section and processing blocks including a liquid processing module configured to perform the liquid process on the substrate by supplying the chemical liquid through the chemical liquid supply path are stacked.   
     
     
         9 . The chemical liquid container replacement device of  claim 1 , further comprising:
 an acquisition device configured to acquire identification information for identifying a kind of the chemical liquid stored in the chemical liquid container loaded through the loading/unloading port; and   a transfer controller configured to control the container transfer device,   wherein, in the container arrangement section, the chemical liquid containers storing different kinds of chemical liquids therein are respectively arranged to correspond to preset arrangement positions,   when the kind of the chemical liquid identified by the identification information acquired in the acquisition device is identical with a kind of a chemical liquid corresponding to the arrangement position of a transfer target position of the chemical liquid container loaded through the loading/unloading port, the transfer controller transfers the chemical liquid container to the arrangement position.   
     
     
         10 . The chemical liquid container replacement device of  claim 1 ,
 wherein the chemical liquid supply paths are connected to a resist coating module configured to coat a resist on the substrate and a developing module configured to supply a developing liquid to the substrate after being exposed, and   the chemical liquid containers storing a resist liquid or a developing liquid therein are arranged in the container arrangement section.   
     
     
         11 . A container mounting module on which a chemical liquid container connected with a base end side of a chemical liquid supply path is mounted, the container mounting module comprising:
 an attachment/detachment device configured to attach and detach the base end side of the chemical liquid supply path with respect to the chemical liquid container which is mounted on the container mounting module and which stores a chemical liquid for performing a liquid process on a substrate; and   a gas supply device configured to supply a clean gas into the container mounting module.   
     
     
         12 . A chemical liquid container replacement method of replacing a chemical liquid container that supplies a chemical liquid for performing a liquid process on a substrate, the chemical liquid container replacement method comprising:
 detaching a base end side of a chemical liquid supply path connected with a completely used chemical liquid container; and   attaching the base end side of the chemical liquid supply path to a new chemical liquid container,   wherein the detaching of a base end side and the attaching of the base end side are carried out in a space partitioned from an external atmosphere.   
     
     
         13 . A substrate processing apparatus comprising:
 a carrier block to which a carrier accommodating multiple substrates is loaded;   a processing block, horizontally arranged in parallel with the carrier block, including a liquid processing module configured to perform a liquid process on a substrate unloaded from the carrier within the carrier block by supplying a chemical liquid to the substrate; and   a chemical liquid block arranged in a row to be parallel with the carrier block and the processing block and configured to accommodate multiple chemical liquid containers each storing the chemical liquid to be supplied to the liquid processing module,   wherein the chemical liquid block includes:   a container arrangement section in which the multiple chemical liquid containers are arranged in a direction orthogonal to an arrangement direction of the carrier block and the processing block;   a loading/unloading port through which the chemical liquid container is loaded and unloaded; and   a device configured to automatically replace a completely used chemical liquid container with a new chemical liquid container between the container arrangement section and the loading/unloading port.   
     
     
         14 . The substrate processing apparatus of  claim 13 ,
 wherein a path for the substrate is formed in the chemical liquid block.   
     
     
         15 . The substrate processing apparatus of  claim 14 ,
 wherein the path for the substrate is surrounded by a cylindrical member extended in a moving direction of the substrate.   
     
     
         16 . The substrate processing apparatus of  claim 13 ,
 wherein the chemical liquid block is provided between the carrier block and the processing block.   
     
     
         17 . The substrate processing apparatus of  claim 13 ,
 wherein the processing block includes a first liquid processing module configured to perform a liquid process on the substrate with a chemical liquid in order to form a coating film including a resist film on the substrate; and a second liquid processing module configured to perform a developing process on the substrate after being exposed with a developing liquid serving as the chemical liquid,   an interface block connected to an exposure device and configured to transfer the substrate between the processing block and the exposure device is provided at a side opposite to the carrier block when viewed from the processing block, and   the chemical liquid block is provided between the processing block and the interface block.   
     
     
         18 . The substrate processing apparatus of  claim 13 ,
 wherein when an arrangement direction of the carrier block and the processing block is set to be a forward/backward direction, a loading/unloading opening for the chemical liquid container is formed at least one of left and right sides of the chemical liquid block while surrounding the chemical liquid block.   
     
     
         19 . The substrate processing apparatus of  claim 13 ,
 wherein a loading/unloading opening for the chemical liquid container is formed on a ceiling portion surrounding the chemical liquid block.