Apparatus for fabricating organic light emitting display panel and method of fabricating organic light emitting display panel using the same

Abstract

An apparatus for fabricating an organic light emitting display panel is disclosed. In one embodiment, the apparatus includes i) a first roll around which a film is wound to be continuously drawn, ii) a second roll arranged to face the first roll and around which the film is continuously wound, iii) a plurality of chambers disposed between the first and second rolls and through which the film passes, and in which laser induced thermal imaging (LITI) is performed on a substrate by forming a transfer layer on the film, and iv) a gate unit installed at least one of the chambers and disposed at at least one of a film inlet and a film output of the chambers that are installed, to maintain a substantially vacuum state in the chambers during passing of the film.

What is claimed is: 
     
         1 . An apparatus for fabricating an organic light emitting display panel, the apparatus comprising:
 a first roll around which a film is wound to be substantially continuously drawn;   a second roll arranged to face the first roll and around which the film is substantially continuously wound;   a plurality of chambers disposed between the first and second rolls and through which the film passes, and in which laser induced thermal imaging (LITI) is performed on a substrate based on a transfer layer formed on the film; and   a gate unit installed in at least one of the chambers and disposed at at least one of a film inlet and a film output of the chambers that are installed, to maintain a substantially vacuum state in the chambers during passing of the film.   
     
     
         2 . The apparatus of  claim 1 , wherein the chambers comprise a first chamber configured to receive the film released from the first roll, wherein the first chamber comprises a deposition unit configured to form the transfer layer on a first surface of the film, and wherein the first chamber is configured to output the film on which the transfer film is formed. 
     
     
         3 . The apparatus of  claim 2 , wherein the deposition unit comprises:
 a plurality of support rolls configured to support a second surface of the film, wherein the second surface is opposing the first surface;   a plurality of auxiliary rolls supporting an area other than a deposition area of the first surface of the film; and   a deposition source configured to eject a material for the transfer layer toward the first surface of the film.   
     
     
         4 . The apparatus of  claim 2 , wherein the chambers comprise a second chamber arranged close to the first chamber and configured to receive the film output from the first chamber, wherein the second chamber comprises a combination unit configured to make the film and the substrate closely contact each other such that the transfer layer of the film faces the substrate, and wherein the second chamber is further configured to output the film and substrate. 
     
     
         5 . The apparatus of  claim 4 , wherein the combination unit comprises a i) substrate input device configured to make the substrate input into the second chamber contact the film and ii) a plurality of upper and lower combination rolls which support the film and substrate from the upper and lower sides, respectively,
 and wherein at least one of the upper and lower combination rolls has an indented central portion.   
     
     
         6 . The apparatus of  claim 4 , wherein the chambers comprise a third chamber arranged close to the second chamber and configured to receive the film and substrate output from the second chamber, wherein the third chamber comprises a transfer unit configured to transfer the transfer layer to the substrate based on a laser beam irradiated onto the film or the substrate, and wherein the third chamber is further configured to output the film and substrate. 
     
     
         7 . The apparatus of  claim 6 , wherein the transfer unit comprises i) a beam irradiator configured to irradiate a laser beam onto the film or the substrate, ii) a mask interposed between the beam irradiator and the film or the substrate, and iii) an aligner configured to align the mask and the substrate. 
     
     
         8 . The apparatus of  claim 6 , wherein the chambers comprise a fourth chamber arranged close to the third chamber and configured to receive the film and substrate output from the third chamber, wherein the fourth chamber comprises a detachment unit configured to detach the substrate from the film, and wherein the fourth chamber is further configured to output the substrate. 
     
     
         9 . The apparatus of  claim 8 , wherein the second roll is disposed in the fourth chamber. 
     
     
         10 . The apparatus of  claim 8 , wherein the detachment unit comprises a detachment roll that winds the film in a direction to be separated from the substrate. 
     
     
         11 . The apparatus of  claim 1 , wherein the substrate is disposed above the film. 
     
     
         12 . The apparatus of  claim 1 , wherein the gate unit comprises i) a pair of gate blocks arranged facing each other and driven to approach and be separated from each other, ii) a plurality of pad units disposed on surfaces of the gate blocks facing each other and supporting the film, and iii) a plurality of vacuum suction holes installed in the gate blocks and the pads to respectively correspond to the pad units. 
     
     
         13 . The apparatus of  claim 12 , wherein each of the pad units further comprises a suction unit having an edge extending close to the film, and wherein the edge is configured to be elastically deformed based on a pressure applied from the film.