Substrate Temperature Regulating Device and Substrate Processing Apparatus Using the Same

Abstract

Provided is a device for regulating a temperature of a substrate within a chamber of a substrate processing apparatus, which includes: a mounting stand configured to mount the substrate thereon and including a temperature regulating medium flow path formed therein; a substrate elevating mechanism configured to move the substrate up and down between a first position and a second position; a first temperature regulating unit configured to supply a temperature regulating medium to the flow path and configured to regulate the temperature of the substrate to a first temperature in the first position; a second temperature regulating unit installed below the mounting stand and configured to regulate the substrate to a second temperature by emitting light toward the substrate in the second position and heating the substrate; and a light transmitting window configured to transmit the light emitted from the second temperature regulating unit.

What is claimed is: 
     
         1 . A substrate temperature regulating device for regulating a temperature of a substrate within a chamber of a substrate processing apparatus, the device comprising:
 a mounting stand configured to mount the substrate thereon, the mounting stand including a temperature regulating medium flow path formed therein;   a substrate elevating mechanism configured to move the substrate up and down between a first position defined on the mounting stand and a second position defined above the mounting stand;   a first temperature regulating unit configured to supply a temperature regulating medium to the temperature regulating medium flow path and configured to regulate the temperature of the substrate to a first temperature in the first position;   a second temperature regulating unit installed below the mounting stand and configured to regulate the substrate to a second temperature by emitting light toward the substrate positioned in the second position and heating the substrate, the light having a wavelength that is absorbed by the substrate; and   a light transmitting window installed in the mounting stand and configured to transmit the light emitted from the second temperature regulating unit.   
     
     
         2 . The device of  claim 1 , wherein the second temperature regulating unit is installed below the mounting stand, and the light transmitting window includes a light transmitting member fitted to a transmission hole in the mounting stand, where the transmission hole extends through the mounting stand from the front surface to the rear surface. 
     
     
         3 . The device of  claim 2 , wherein the light transmitting member of the light transmitting window includes a first light transmitting member and a second light transmitting member, and a space defined between the first light transmitting member and the second light transmitting member,
 wherein the space serves as a portion of the temperature regulating medium flow path.   
     
     
         4 . The device of  claim 3 , wherein the temperature regulating medium is a liquid that transmits the light emitted from the second temperature regulating unit. 
     
     
         5 . The device of  claim 4 , wherein the temperature regulating medium is selected from a group consisting of a fluorine-based coolant and water. 
     
     
         6 . The device of  claim 3 , wherein the first light transmitting member has a front surface flush with the front surface of the mounting stand. 
     
     
         7 . The device of  claim 3 , wherein the first light transmitting member is made of sapphire. 
     
     
         8 . The device of  claim 3 , wherein the second light transmitting member is made of quartz. 
     
     
         9 . The device of  claim 1 , wherein at least a front surface of the mounting stand is made of aluminum 
     
     
         10 . The device of  claim 1 , wherein the second temperature regulating unit includes:
 a light emitting element array having a plurality of light emitting elements supported on a support body;   a cooling plate configured to support the light emitting element array and configured to cool the light emitting elements; and   a power supply unit configured to supply electric power to the light emitting elements.   
     
     
         11 . A substrate processing apparatus for processing a substrate at different temperature settings, comprising:
 a chamber configured to accommodate the substrate; and   a substrate temperature regulating device of  claim 1  installed in a bottom portion of the chamber,   wherein the substrate temperature regulating device is configured to regulate a temperature of the substrate at a first temperature during a first process and to a second temperature during a second process.   
     
     
         12 . The apparatus of  claim 11 , further comprising:
 a process gas supply system configured to supply a process gas to the chamber; and   an exhaust unit configured to evacuate an inside of the chamber.   
     
     
         13 . The apparatus of  claim 12 , further comprising:
 a shower head installed in a top portion of the chamber and configured to introduce the process gas into the chamber.   
     
     
         14 . The apparatus of  claim 12 , further comprising:
 a plasma source installed in a top portion of the chamber and configured to convert the process gas to plasma within the chamber.