Dressing device, chemical mechanical polishing apparatus including the same, and dresser disc used in the same

Abstract

A dressing device capable of remedying wobbly rotation of a dresser disc, a CMP apparatus, and a dresser disc. The dressing device is capable of dressing a polishing pad and includes a holder which can be coupled to a dresser driving shaft capable of rotating and moving upward and downward, a dresser disc which can be mounted to the holder and has a dressing surface to be rubbed against a polishing pad, a set of concave and convex torque transmitting sections extending in a disc radial direction which are formed at the holder and the dresser disc and fit together when the dresser disc is mounted to the holder, and a set of contact surfaces in the shapes of flat surfaces which are formed as one surfaces around the set of torque transmitting sections and come into surface-to-surface contact at the time of transmitting torque of the dresser driving shaft.

What is claimed is: 
     
         1 . A dressing device for dressing a polishing pad, comprising:
 a holder which can be coupled to a dresser driving shaft capable of rotating and has a surface for contact a dresser disc;   a dresser disc which can be mounted to the holder and has a dressing surface to be rubbed against a polishing pad and has a mount surface to be mounted to the holder;
 wherein the mount surface of the dresser disc has a concave portion extending in a radial direction of the mount surface; 
   the surface of the holder has a convex portion extending in a radial direction of the surface;   the concave portion and the convex portion have flat surfaces each other;   the concave portion is coupled to the convex portion;   the concave portion and the covex portion form a torque transmitting section, and;   the flat surfaces of the concave portion and the convex portion come into surface-to-surface contact each other for transmitting a torque of dresser driving shaft when the dresser disc is mounted to the holder.   
     
     
         2 . A dressing device for dressing a polishing pad, comprising:
 a holder which can be coupled to a dresser driving shaft capable of rotating and has a surface for contact a dresser disc;   a dresser disc which can be mounted to the holder and has a dressing surface to be rubbed against a polishing pad and has a mount surface to be mounted to the holder;   wherein the mount surface of the dresser disc has a convex portion extending in a radial direction of the mount surface;   the surface of the holder has a concave portion extending in a radial direction of the surface;   the concave portion and the convex portion have flat surfaces each other;   the convex portion is coupled to the concave portion;   the convex portion and the concave portion form a torque transmitting section, and;   the flat surfaces of the convex portion and the concave portion come into surface-to-surface contact each other for transmitting a torque of dresser driving shaft when the dresser disc is mounted to the holder.   
     
     
         3 . The dressing device according to  claim 1 , wherein at least one pair of the torque transmitting sections is formed symmetrically with respect to a rotation center of the dresser disc in a disc plan view. 
     
     
         4 . The dressing device according to  claim 1 , wherein the flat surfaces of the transmitting section is formed on a straight line passing through the rotation center of the dresser disc in a disc plan view. 
     
     
         5 . The dressing device according to  claim 3 , wherein the flat surfaces of the one pair of the torque section is formed on a straight line passing through the rotation center of the dresser disc in a disc plan view. 
     
     
         6 . The dressing device according to  claim 1 , wherein the flat surfaces is formed at an angle not more than 13° with respect to a straight line passing through the rotation center of the dresser disc in a disc plan view. 
     
     
         7 . The dressing device according to  claim 1 , wherein the holder has a peripheral wall provided at an outer periphery which protrudes downward and has a disc storage sections which can store the dresser disc inside the peripheral wall. 
     
     
         8 . The dressing device according to  claim 1 , wherein the a width on the disc outer edge side of the torque transmitting section is not more than ½ of a distance from an inner end point of the flat surfaces to the rotation center in a disc plan view. 
     
     
         9 . The dressing device according to  claim 1 , wherein a length of an edge portion of the torque transmitting section appearing at an upper surface of the dressing disc is not less than 0.4 of a disc radius in a disc plan view. 
     
     
         10 . A dresser disc which is used in a dressing device for dressing a polishing pad and is mountable to a holder coupled to a dresser driving shaft capable of rotating, comprising:
 a concave or convex torque transmitting section extending in a disc radial direction which couples when the dresser disc is mounted to the holder; and   a contact surface in the shape of a flat surface which is formed as one surface around the torque transmitting section.   
     
     
         11 . The dressing device according to  claim 2 , wherein at least one pair of the torque transmitting sections is formed symmetrically with respect to a rotation center of the dresser disc in a disc plan view. 
     
     
         12 . The dressing device according to  claim 2 , wherein the flat surfaces of the transmitting section is formed on a straight line passing through the rotation center of the dresser disc in a disc plan view. 
     
     
         13 . The dressing device according to  claim 11 , wherein the flat surfaces of the one pair of the torque section is formed on a straight line passing through the rotation center of the dresser disc in a disc plan view. 
     
     
         14 . The dressing device according to  claim 2 , wherein the flat surfaces is formed at an angle not more than 13° with respect to a straight line passing through the rotation center of the dresser disc in a disc plan view. 
     
     
         15 . The dressing device according to  claim 2 , wherein the holder has a peripheral wall provided at an outer periphery which protrudes downward and has a disc storage sections which can store the dresser disc inside the peripheral wall. 
     
     
         16 . The dressing device according to  claim 2 , wherein the a width on the disc outer edge side of the torque transmitting section is not more than ½ of a distance from an inner end point of the flat surfaces to the rotation center in a disc plan view. 
     
     
         17 . The dressing device according to  claim 2 , wherein a length of an edge portion of the torque transmitting section appearing at an upper surface of the dressing disc is not less than 0.4 of a disc radius in a disc plan view.