Vacuum pump and arrangement with vacuum pump

Abstract

A vacuum pump includes a housing having an axial inlet a pumping unit including a stator, a rotor rotatably supported in the stator, and a drive for driving the rotor. At least one housing part which has at least one outlet, is placed on the housing in an axial direction and is connected with the housing.

What is claimed is: 
     
         1 . A vacuum pump, comprising a housing ( 2 ) having an axial inlet ( 7 ); a pumping unit including a stator ( 5 ), a rotor ( 3 ) rotatably supported in the stator, and a drive ( 114 ) for driving the rotor; and at least one additional placed-on housing part ( 10 ) attachable to the housing ( 2 ) in an axial direction, connectable with the housing, and having at least one outlet ( 12 ). 
     
     
         2 . A vacuum pump according to  claim 1 , wherein the at least one housing part ( 10 ) has at least one radial inlet ( 11 ). 
     
     
         3 . A vacuum pump according to  claim 2 , wherein the at least one radial inlet ( 11 ) is provided at an end of the placed-on housing part ( 10 ) remote from the drive. 
     
     
         4 . A vacuum pump according to  claim 1 , wherein the housing ( 2 ) of the vacuum pump ( 1 ) has at least one radial inlet ( 8 ,  9 ). 
     
     
         5 . A vacuum pump according to  claim 1 , wherein the at least one placed-on housing part ( 10 ) has a same outer profile as the housing ( 2 ). 
     
     
         6 . A vacuum pump according to  claim 1 , wherein pump-active elements of the pumping unit are at least partially located in the at least one placed-on housing part ( 10 ). 
     
     
         7 . A vacuum pump according to  claim 1 , wherein the at least one placed on housing part ( 10 ) is free of the pump-active elements of the pumping unit. 
     
     
         8 . A vacuum pump according to  claim 1 , wherein the housing ( 2 ) and the at least one placed-on component ( 10 ) have a total length (L) of at least 550 mm. 
     
     
         9 . A vacuum pump according to  claim 1 , wherein the housing ( 2 ) and the at least one placed-on component ( 10 ) have a total length (L) of at least 700 mm. 
     
     
         10 . A vacuum pump according to  claim 1 , wherein the inlet ( 7 ) of the housing ( 2 ) and the outlet ( 12 ) of the at least one placed-on housing part overlay each other. 
     
     
         11 . A vacuum pump according to  claim 1 , wherein at least one of thermal sealing element, vibration-isolation sealing element, and electrical sealing element ( 21 ,  22 ) is provided between the housing ( 2 ) of the vacuum pump ( 1 ) and the at least placed-on housing part ( 10 ). 
     
     
         12 . A vacuum pump according to  claim 1 , wherein the vacuum pump ( 1 ) comprises at least one of turbomolecular pump stages and Holweck pump stages. 
     
     
         13 . A vacuum pump according to  claim 1 , wherein the vacuum pump has at least two inlets ( 8 ,  9 ,  11 ). 
     
     
         14 . An arrangement comprising a vacuum pump including a housing ( 2 ) having an axial inlet ( 7 ), a pumping unit having a stator ( 5 ), a rotor ( 3 ) rotatably supported in the stator, and a drive ( 114 ) for driving the rotor, and a pump flange; a chamber ( 102 ) having a chamber flange; means for vacuum-tightly connecting the vacuum pump and the chamber and including the pump flange and the chamber flange; wherein the vacuum pump further includes at least one additional placed-on housing part ( 10 ) attachable to the housing ( 2 ) in an axial direction, connectable with the housing, and having at least one outlet ( 12 ) and at least one radial inlet ( 11 ) connectable with the chamber ( 102 ). 
     
     
         15 . An arrangement according to  claim 14 , wherein the chamber ( 102 ) comprises a plurality of different chambers ( 121 ,  122 ,  123 ,  166 ), and the at least one radial inlet ( 11 ) is connected with at least one of the different chambers ( 166 ). 
     
     
         16 . An arrangement according to  claim 14 , wherein the arrangement further comprises a force-transmitting structure ( 165 ) for transmitting force from an application point ( 156 ) to at least one operating point provided on the connecting means. 
     
     
         17 . An arrangement according to  claim 14 , further comprising a mass-spectrometer ( 124 ). 
     
     
         18 . An arrangement according to  claim 14 , wherein the arrangement comprises a receiver, and the housing of the vacuum pump and at least one placed-on housing part have an outer profile adapted to a receiver profile.