US2015055214A1PendingUtilityA1

Catadioptric projection objective

65
Assignee: ZEISS CARL SMT GMBHPriority: Sep 24, 2003Filed: Oct 31, 2014Published: Feb 26, 2015
Est. expirySep 24, 2023(expired)· nominal 20-yr term from priority
Inventors:David ShaferWilhelm UlrichAurelian DodocRudolf Von BuenauHans-Juergen MannAlexander EppleSusanne BederWolfgang Singer
G03F 7/70225G02B 17/0892G02B 17/0804G02B 21/02G03F 7/70958G03F 7/70341G03F 7/70275G02B 13/22G02B 17/08G02B 17/0816G03F 7/70966G02B 21/33G02B 17/0812G02B 13/16
65
PatentIndex Score
0
Cited by
0
References
0
Claims

Abstract

A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective has a first, refractive objective part for imaging the pattern provided in the object plane into a first intermediate image; a second objective part including at least one concave mirror for imaging the first Intermediate imaging into a second intermediate image; and a third, refractive objective part for imaging the second intermediate imaging onto the image plane; wherein the projection objective has a maximum lens diameter D max , a maximum image field height Y′, and an image side numerical aperture NA; wherein COMP1=D max /(Y′·NA 2 ) and wherein the condition COMP1<10 holds.

Claims

exact text as granted — not AI-modified
1 . A catadioptric projection objective for imaging a pattern provided in an object plane of the projection objective onto an image plane of the projection objective comprising:
 a first, refractive objective part for imaging the pattern provided in the object plane to a first intermediate image;   a second objective part including at least one concave mirror for imaging the first intermediate imaging into a second intermediate image;   a third, refractive objective part for imaging the second intermediate imaging onto the image plane, wherein:   the projection objective has a maximum lens diameter D max , a maximum image field height Y′, and an image side numerical aperture NA; wherein
   COMP1 =D   max /( Y′·NA   2 ) 
   and wherein the following condition holds:   COMP1<10.

Join the waitlist — get patent alerts

Track US2015055214A1 — get alerts on status changes and closely related new filings.

We store only your email — no account needed. See our privacy policy.