Retainer ring structure for chemical-mechanical polishing machine

Abstract

A retainer ring structure for a chemical-mechanical polishing (CMP) machine includes: a upper ring made of metal and having a plurality of bolt holes formed on the top surface thereof and coupled to a head of the CMP machine; and a lower ring made of resin and having a coupling groove formed in the center thereof and coupled to the upper ring, wherein the upper ring and the lower ring are coupled to each other such that the top surface of the upper ring and the circumferential top surface of the lower ring are positioned on the same plane.

What is claimed is: 
     
         1 . A retainer ring structure for a chemical-mechanical polishing (CMP) machine, comprising:
 a upper ring made of metal and having a plurality of bolt holes formed on the top surface thereof and coupled to a head of the CMP machine; and   a lower ring made of resin and having a coupling groove formed in the center thereof and coupled to the upper ring,   wherein the upper ring and the lower ring are coupled to each other such that the top surface of the upper ring and the circumferential top surface of the lower ring are positioned on the same plane.   
     
     
         2 . The retainer ring structure of  claim 1 , wherein the bottom of the upper ring made of metal has a multi-stage structure, the coupling groove coupled to the bottom of the upper ring has a multi-stage structure corresponding to the bottom of the upper ring, and the bottom of the upper ring is coupled to the coupling groove through a fitting method or welding method. 
     
     
         3 . The retainer ring structure of  claim 1 , wherein the upper ring made of metal has a male screw thread formed on the bottom thereof, the coupling groove coupled to the bottom of the upper ring has a female screw thread formed on an inner wall thereof, and the upper ring and the lower ring are screwed to each other. 
     
     
         4 . A retainer ring structure for a CMP machine, comprising:
 an upper ring made of metal, having a plurality of bolt holes formed on the top surface thereof and coupled to a head of the CMP machine, having a center groove formed in the center thereof to a predetermined depth, and having a pair of edge protrusions formed at side surfaces of the center groove; and   a lower ring made of resin, having a coupling groove formed in the center thereof and coupled to the upper ring, and having a center protrusion formed in the center of the coupling groove and inserted into the center groove of the upper ring.   
     
     
         5 . The retainer ring structure of  claim 4 , wherein the upper ring and the center protrusion of the lower ring have coupling bolt holes communicating with each other such that the upper ring and the lower ring are coupled through the coupling bolts.