Retainer ring structure for chemical-mechanical polishing machine and method for manufacturing the same

Abstract

A retainer ring structure for a chemical-mechanical polishing (CMP) machine includes: an insert ring made of metal and having a plurality of holes formed at the top surface thereof and coupled to a head of the CMP machine; an insert pin made of resin, including a body having a hollow portion of which the top surface is opened and one or more elongated grooves formed at side surfaces thereof in a longitudinal direction, and press-fitted into a hole of the insert ring so as to be subjected to a tapping process; and an outer ring formed to surround the insert pin and the insert ring.

What is claimed is: 
     
         1 . A retainer ring structure for a chemical-mechanical polishing (CMP) machine, comprising:
 an insert ring made of metal and having a plurality of holes formed at the top surface thereof and coupled to a head of the CMP machine;   an insert pin made of resin, comprising a body having a hollow portion of which the top surface is opened and one or more elongated grooves formed at side surfaces thereof in a longitudinal direction, and press-fitted into a hole of the insert ring so as to be subjected to a tapping process; and   an outer ring formed to surround the insert pin and the insert ring.   
     
     
         2 . A retainer ring structure for a CMP machine, comprising:
 an insert ring made of metal and having a plurality of holes formed at the top surface thereof and coupled to a head of the CMP machine and a female screw thread formed therein;   an insert pin made of resin and comprising a cylindrical body having a hollow portion of which the top surface is opened and a male screw thread formed at side surfaces thereof, wherein the inserting is screwed to a hole of the insert ring so as to be subjected to a tapping process; and   an outer ring formed to surround the insert pin and the insert ring.   
     
     
         3 . A method for manufacturing a retainer ring structure for a CMP machine, comprising:
 forming a plurality of holes at the top surface of an insert ring made of metal such that a head of the CMP machine is coupled to the holes;   coupling a plurality of insert pins made of resin to the plurality of holes of the insert ring, the insert pins each including a body having a hollow portion of which the top surface is opened and one or more elongated grooves formed at side surfaces of the body in a longitudinal direction;   mounting the insert ring having the insert pins coupled thereto in a mold, and injection-molding resin to form an outer ring surrounding the insert ring; and   tapping the insert pins.   
     
     
         4 . The method of  claim 3 , wherein each of the insert pins has a protrusion mounted in the mold and cut after injection molding and a body portion connected to one end of the body and subjected to a tapping process after injection molding. 
     
     
         5 . A method for manufacturing a retainer ring structure for a CMP machine, comprising:
 forming a plurality of holes at the top surface of an insert ring made of metal such that a head of the CMP machine is coupled to the holes, and forming a female screw thread inside the insert ring;   coupling a plurality of insert pins made of resin to the plurality of holes of the insert ring, the insert pins each including a cylindrical body having a hollow portion of which the top surface is opened and a male screw formed at side surfaces of the body;   mounting the insert ring having the insert pins coupled thereto in a mold, and injection-molding resin to form an outer ring surrounding the insert ring; and   tapping the insert pins.