Method for producing a metal layer on a surface

Abstract

The invention concerns a method for producing a metal coating on a portion of the surface of a substrate of a microelectronic device, wherein it comprises, using a modified nucleic acid strand comprising a nucleic acid strand structure, at least one metal nanoparticle and/or a metal atom and at least one chemical function, at least one step of fixing the chemical function of the at least one modified nucleic acid strand on the portion of the surface of the substrate.

1 . A method for producing a metal-based coating on at least one portion of the surface of a substrate of a microelectronic device, wherein it comprises:
 using a modified nucleic acid strand comprising a nucleic acid strand structure, at least one metal-based nanoparticle and/or a metal atom and at least one chemical function, at least one step of fixing the modified nucleic acid strand to the portion of the surface of the substrate; said portion of the surface of the substrate being a three-dimensional surface in the form of a cavity.   
     
     
         2 . The method according to  claim 1 , wherein the step of fixing the modified nucleic acid strand is performed by means of the chemical function. 
     
     
         3 . The method according to  claim 1 , wherein the method comprises a step of at least partial destruction of the nucleic acid strand structure and/or of the chemical function. 
     
     
         4 . The method according to  claim 3 , wherein the step of at least partial destruction of the nucleic acid strand structure and/or of the chemical function comprises a heating step configured so as to partially or completely destroy the structure of the nucleic acid strand and/or of the chemical function. 
     
     
         5 . The method according to  claim 1 , wherein the cavity has a depth greater than its width. 
     
     
         6 . The method according to  claim 1 , wherein the step of fixing the at least one modified nucleic acid strand on the portion of the surface of the substrate is obtained by putting the surface of the substrate in contact with a bath comprising at least one modified nucleic acid strand. 
     
     
         7 . The method according to  claim 1 , wherein the portion of the surface of the substrate comprises a chemical group configured so as to interact with the chemical function fixed on the structure of the at least one nucleic acid strand. 
     
     
         8 . The method according to  claim 1 , comprising several steps of fixing modified nucleic acid strands. 
     
     
         9 . The method according to  claim 8 , wherein the modified nucleic acid strands are identical or different through the structure of their respective strands and/or through their respective chemical functions and/or through the nature and/or dimensions of the metal-based nanoparticles and/or the metal atoms. 
     
     
         10 . The method according to  claim 8 , comprising, after the steps of fixing modified nucleic acid strands, a single step of destruction of the nucleic acid strand structures. 
     
     
         11 . The method according to  claim 1 , comprising, prior to said at least one step of fixing the at least one modified nucleic acid strand on the portion of the surface of the substrate, a step of deposition of a grafting layer on at least the portion of the surface of the substrate. 
     
     
         12 . The method according to  claim 1 , wherein the portion of the surface of the substrate or the grafting layer comprises a hydrophilic or hydrophobic material. 
     
     
         13 . The method according to  claim 1 , wherein the chemical function is a group of hydrophilic or hydrophobic atoms. 
     
     
         14 . The method according to  claim 1 , wherein the metal-based coating forms part of a via. 
     
     
         15 . The method according to  claim 1 , wherein the metal atom is chosen from copper, nickel, aluminium, palladium, gold or silver. 
     
     
         16 . The method according to  claim 1 , wherein the metal-based nanoparticle is chosen from a metal, a metal oxide, a metal nitride or a metal carbide. 
     
     
         17 . The method according to  claim 1 , comprising, prior to the step of fixing the at least one modified nucleic acid strand on the portion of the surface of the substrate, a step of irradiating, by ultraviolet radiation, the portion of the surface of the substrate intended to receive the metal-based coating. 
     
     
         18 . The method according to  claim 1 , comprising, prior to the step of fixing the at least one modified nucleic acid strand on the portion of the surface of the substrate, a step of irradiating, by ultraviolet rays, the entire surface of the substrate except for the portion of the surface intended to receive the metal-based coating. 
     
     
         19 . A The method according to  claim 1 , comprising the use of at least one nanoparticle with a diameter of between 1 nanometre and 100 nanometres. 
     
     
         20 . Use of at least one modified nucleic acid strand comprising a nucleic acid strand structure, at least one metal-based nanoparticle and/or a metal atom said structure being configured so as to form a metal-based coating on a three-dimensional portion of the surface of a substrate, said portion being a cavity. 
     
     
         21 . Use according to  claim 21 , wherein the modified nucleic acid strand comprises at least one metal-based nanoparticle, said metal being a ferromagnetic metal, said nanoparticle being configured so as to form, under the action of a magnetic field, a coating based on ferromagnetic metal on a portion of the surface of a substrate. 
     
     
         22 . Use according to  claim 21 , wherein:
 at least one first modified nucleic acid strand comprising at least one first metal-based nanoparticle and/or one first metal atom,   and at least one second modified nucleic acid strand comprising at least one second metal-based nanoparticle and/or one second metal atom,   
       are configured so that the first and/or second nanoparticle and the first and/or second metal atom form a coating based on a metal alloy or a composite on a portion of the surface of a substrate. 
     
     
         23 . Use according to  claim 21 , wherein:
 at least one first modified nucleic acid strand comprising at least one first nanoparticle based on a first metal,   and at least one second modified nucleic acid strand comprising at least one second nanoparticle based on one second metal,   
       are configured so that the first and second nanoparticles form a dual-layer coating composed of a deposit based on a first metal of the first nanoparticle covered by a deposit of the second metal of the second nanoparticle on a portion of the surface of a substrate. 
     
     
         24 . Use according to  claim 21 , comprising the use of a nanoparticle having a diameter of between 1 nanometre and 100 nanometres. 
     
     
         25 . The method according to  claim 9 , wherein the modified nucleic acid strands are different through the structure of their respective strands and/or through their respective chemical functions and/or through the nature and/or dimensions of the metal-based nanoparticles and/or the metal atoms.