Annular member and film-forming device in which same is used

Abstract

An annular member 10 according to an aspect of the invention surrounds the periphery of a substrate to be processed 2 . The annular member 10 includes an annular main body 11 which is made of a ceramic sintered body or quartz glass, and has at least one main surface S 1 . The main body 11 has a groove portion G disposed on the main surface S 1 and a plurality of projections 14 protruded from a bottom surface B of the groove portion G. A film forming apparatus 1 according to an aspect of the invention includes the annular member 10 and a reaction chamber 4 in which the annular member 10 is disposed, and which performs formation of a metal film 3 on the substrate to be processed 2 . The groove portion G of the annular member 10 is exposed to the inside of the reaction chamber 4.

1 . An annular member which surrounds the periphery of a substrate to be processed, comprising:
 an annular main body which is made of a ceramic sintered body or quartz glass, and includes at least one main surface,   wherein the main body includes a groove portion disposed on one main surface and a plurality of projections protruded from a bottom surface of the groove portion.   
     
     
         2 . The annular member according to  claim 1 ,
 wherein a surface of each of the plurality of projections is spherical.   
     
     
         3 . The annular member according to  claim 1 ,
 wherein a surface of each of the plurality of projections includes a spherical side surface and a planar head surface.   
     
     
         4 . The annular member according to  claim 1 ,
 wherein a surface of each of the plurality of projections has a plurality of recessed portions in an elongated shape along a circumferential direction of the projection.   
     
     
         5 . The annular member according to  claim 1 ,
 wherein a surface of each of the plurality of projections has a convex portion in a mesh shape along the surface.   
     
     
         6 . The annular member according to  claim 5 ,
 wherein the surface of each of the plurality of projections has a plurality of second recessed portions surrounded by the convex portion.   
     
     
         7 . The annular member according to  claim 6 ,
 wherein an inner surface of each of the second recessed portions is in a concave curved surface shape.   
     
     
         8 . The annular member according to  claim 1 ,
 wherein the bottom surface of the groove portion is in a stepped shape and includes a first surface area and a second surface area of which height positions are different from each other.   
     
     
         9 . The annular member according to  claim 8 ,
 wherein a distance between the first surface area and another main surface of the main body is smaller than a distance between the second surface area and the other main surface of the main body, and   wherein, among the plurality of projections, at least one of the projections is disposed in the second surface area, and the surface of the projection disposed in the second surface area has a flat surface inclined toward the first surface area.   
     
     
         10 . The annular member according to  claim 1 ,
 wherein the main body includes a plurality of concave portions in an elongated shape along a depth direction of the groove portion on an inner wall surface of the groove portion.   
     
     
         11 . The annular member according to  claim 1 ,
 wherein an angle of a corner portion between a side surface of each of the plurality of projections and the bottom surface continuous to the side surface is larger than 90° and smaller than 180°.   
     
     
         12 . The annular member according to  claim 1 ,
 wherein each of the plurality of projections includes a first protruded portion protruded from the bottom surface and a second protruded portion protruded from the first protruded portion and having a width narrower than the first protruded portion.   
     
     
         13 . A film forming apparatus, comprising:
 the annular member according to  claim 1 ; and   a reaction chamber in which the annular member is disposed, and which performs formation of a metal film on the substrate to be processed,   wherein the groove portion of the annular member is exposed to the inside of the reaction chamber.