Optical filter device, optical module, electronic apparatus, and mems device

Abstract

An optical filter device includes a wavelength variable interference filter that has a fixed substrate provided with a fixed reflective film and a movable substrate provided with a movable reflective film, a casing that has an inner space for storing the wavelength variable interference filter therein, and a fixation portion that fixes the wavelength variable interference filter to the casing. In addition, the fixation portion is provided between a side surface of the fixed substrate and an inner surface of the casing.

What is claimed is: 
     
         1 . An optical filter device comprising:
 an interference filter that includes:
 a first reflective film, 
 a second reflective film facing the first reflective film, and 
 a first substrate provided with either of the first reflective film and the second reflective film, the first substrate having a pair of major surfaces and a side surface extending between the pair of major surfaces; 
   a casing that has an inner space storing the interference filter therein; and   a fixation portion fixing the interference filter to the casing,   wherein the fixation portion is provided between the side surface of the first substrate and the casing.   
     
     
         2 . The optical filter device according to  claim 1 ,
 wherein the interference filter includes a second substrate facing the first substrate and provided with the second reflective film, the second substrate having a pair of major surfaces and a side surface extending between the pair of major surfaces,   the first substrate is provided with the first reflective film, and   the fixation portion is provided on the side surface of either of the first substrate and the second substrate.   
     
     
         3 . The optical filter device according to  claim 2 ,
 wherein one of the first substrate and the second substrate includes a projecting portion that projects toward the casing farther than the other of the first substrate and the second substrate in a plan view, and   the fixation portion is provided at the projecting portion.   
     
     
         4 . The optical filter device according to  claim 2 ,
 wherein the second substrate includes a movable portion provided with the second reflective film and a holding portion holding the movable portion in a displaceable manner in the thickness direction, and   the fixation portion is provided on the side surface of the first substrate.   
     
     
         5 . The optical filter device according to  claim 1 ,
 wherein the side surface is planar, and   the fixation portion is provided on the side surface.   
     
     
         6 . The optical filter device according to  claim 1 ,
 wherein the substrate includes a connection terminal electrically connected to a casing terminal provided in the casing, the connection terminal being located at a part of an outer circumferential edge of the substrate in a plan view, and   the connection terminal is provided at the side surface.   
     
     
         7 . The optical filter device according to  claim 1 ,
 wherein the fixation portion is provided at a single sub-portion of the side surface.   
     
     
         8 . The optical filter device according to  claim 1 ,
 wherein the fixation portion is provided at a plurality of spaced apart sub-portions of the side surface.   
     
     
         9 . The optical filter device according to  claim 1 ,
 wherein the substrate includes a second side surface parallel to the first side surface, and   the fixation portion includes a first fixation portion provided on the first side surface and a second fixation portion provided on the second side surface.   
     
     
         10 . The optical filter device according to  claim 9 ,
 wherein the first fixation portion and the second fixation portion are symmetrical with respect to a virtual plane which passes through a center of the substrate and is parallel to the first side surface and the second side surface.   
     
     
         11 . The optical filter device according to  claim 1 ,
 wherein the side surface includes a pair of continuous side surfaces that intersect with one another at an angle, and   the fixation portion is provided on the pair of side surfaces.   
     
     
         12 . The optical filter device according to  claim 1 ,
 wherein the casing includes a support portion that supports the interference filter with respect to the casing, and   the fixation portion is provided between the side surface and the support portion.   
     
     
         13 . A MEMS device comprising:
 a MEMS element provided with a substrate, the substrate having a pair of major surfaces and a side surface extending between the pair of major surfaces;   a casing that has an inner space storing the MEMS element therein; and   a fixation portion that fixes the MEMS element to the casing,   wherein the fixation portion is provided between the side surface of the substrate and the casing.   
     
     
         14 . An optical filter device comprising:
 a casing including:
 a base, and 
 a peripheral wall extending from the base; and 
   an interference filter mounted to the casing, the interference filter including:
 a first substrate having a pair of major surfaces and a side surface extending therebetween, 
 a first reflective film provided on one of the major surfaces of the first substrate, and 
 a second reflective film facing the first reflective film across a gap, 
   wherein the interference filter is fixedly engaged to the casing between the side surface of the interference filter and the peripheral wall of the casing.   
     
     
         15 . The optical filter device according to  claim 14 ,
 wherein the first substrate includes a projection that projects toward the casing farther than the second substrate in a plan view, and   the fixed engagement of the interference filter and the casing is provided at the projecting portion.   
     
     
         16 . The optical filter device according to  claim 14 ,
 wherein fixed engagement of the interference filter and the casing is provided at a single sub-portion of the side surface.   
     
     
         17 . The optical filter device according to  claim 14 ,
 wherein the fixed engagement of the interference filter and the casing is provided at a plurality of spaced apart sub-portions of the side surface.   
     
     
         18 . The optical filter device according to  claim 14 ,
 wherein the side surface includes a pair of parallel side surfaces, and   the fixed engagement of the interference filter and the casing is provided at each of the pair of parallel side surfaces.   
     
     
         19 . The optical filter device according to  claim 18 ,
 wherein locations of the fixed engagement of the interference filter and the casing are symmetrical.   
     
     
         20 . The optical filter device according to  claim 14 ,
 wherein the side surface includes a pair of continuous side surfaces that intersect with one another at a corner, and   the fixed engagement of the interference filter and the casing is provided at a sub-portion of the side wall constituted by adjacent parts of the pair of side surfaces and the corner.