Deposition source for deposition device

Abstract

A deposition source for a deposition device includes a crucible. A heater is disposed outside of the crucible and the heater has a plate shape. The deposition source includes a heater guide. The heater is disposed within the heater guide, and the heater guide supports the heater. An external supporter is connected to the heater guide.

What is claimed is: 
     
         1 . A deposition source for a deposition device, comprising:
 a crucible;   a heater disposed outside of the crucible, the heater having a plate shape;   a heater guide, inside which the heater is disposed, the heater guide supports the heater; and   an external supporter is connected to the heater guide.   
     
     
         2 . The deposition source of  claim 1 , wherein the crucible has an open top. 
     
     
         3 . The deposition source of  claim 1 , wherein the heater comprises:
 a first heater unit; and   a second heater unit, wherein the first heater unit and the second heater unit are separated from each other.   
     
     
         4 . The deposition source of  claim 3 , wherein an insertion hole is disposed in the heater guide, and the first heater unit and the second heater unit are disposed in the insertion hole. 
     
     
         5 . The deposition source of  claim 4 , wherein the heater guide comprises a contact-preventing protrusion disposed in the insertion hole, wherein the contact-preventing protrusion prevents contact between the first heater unit and the second heater unit. 
     
     
         6 . The deposition source of  claim 3 , wherein the heater guide comprises:
 a first heater guide unit within which the first heater unit and the second heater unit are disposed; and   a second heater guide unit coupled to the first heater guide unit, wherein the first heater unit and the second heater unit are disposed in the second heater guide unit and the first heater guide unit and the second heater guide united are separated from each other.   
     
     
         7 . The deposition source of  claim 1 , wherein a plurality of heater guides and a plurality of external supporters are provided, and
 wherein each of the plurality of external supporters is disposed between the plurality of heater guides.   
     
     
         8 . The deposition source of  claim 7 , wherein each of the plurality of external supporters have a different height from each other. 
     
     
         9 . The deposition source of  claim 8 , wherein the heights of the plurality of external supporters are increasingly higher from a bottom to a top of the crucible. 
     
     
         10 . The deposition source of  claim 1 , further comprising a reflector disposed outside the external supporter. 
     
     
         11 . The deposition source of  claim 9 , further comprising an external shield disposed outside the reflector. 
     
     
         12 . The deposition source of  claim 11 , further comprising a cooling jacket disposed outside the external shield. 
     
     
         13 . The deposition source of  claim 1 , wherein the external supporter comprises a ceramic material. 
     
     
         14 . The deposition source of  claim 1 , wherein the external supporter has a cylindrical shape, and the external supporter surrounds an external surface of the heater. 
     
     
         15 . A deposition source, comprising:
 an internal crucible coupled to an external crucible, wherein the external crucible is configured to surround an outside of the internal crucible;   a heater disposed outside of the crucible, wherein the heater comprises a first heater unit and a second heater unit, and the heater is configured to generate heat and provide the generated heat to the internal crucible;   a heater guide coupled to the internal crucible, wherein the heater guide comprises an insertion hole and a contact-preventing protrusion, the first heater unit and the second heater unit are disposed within the insertion hole and the contact-preventing guide is configured to maintain a separation between the first heater unit and the second heater unit; and   a reflector configured to prevent the heat generated by the heater from being radiated or conducted outside of the deposition source.   
     
     
         16 . The deposition source of  claim 15 , further comprising a cooling jacket disposed outside of the reflector. 
     
     
         17 . The deposition source of  claim 15 , further comprising an external shield disposed outside the reflector. 
     
     
         18 . The deposition source of  claim 15 , further comprising a cooling water connecting pipe coupled to a cooling jacket, wherein the cooling water connecting pipe and the cooling jacket are configured to reduce heating of components outside of the deposition source by the heater. 
     
     
         19 . The deposition source of  claim 15 , further comprising an external supporter coupled to the heater guide. 
     
     
         20 . The deposition source of  claim 15 , wherein the crucible has an open top.